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Tribology Issues and Opportunities in MEMS

Tribology Issues and Opportunities in MEMS
Author: Bharat Bhushan
Publisher: Springer Science & Business Media
Total Pages: 652
Release: 2012-12-06
Genre: Science
ISBN: 9401150508

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Micro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about tribology and mechanical properties on micro- to nanoscales of the materials used in the construction of MEMS devices. The MEMS community needs to be exposed to the state-of-the-artoftribology and vice versa. Fundamental understanding of friction/stiction, wear and the role of surface contamination and environmental debris in micro devices is required. There are significantadhesion, friction and wear issues in manufacturing and actual use, facing the MEMS industry. Very little is understood about the tribology of bulk silicon and polysilicon films used in the construction ofthese microdevices. These issues are based on surface phenomenaand cannotbe scaled down linearly and these become increasingly important with the small size of the devices. Continuum theory breaks down in the analyses, e. g. in fluid flow of micro-scale devices. Mechanical properties ofpolysilicon and other films are not well characterized. Roughness optimization can help in tribological improvements. Monolayers of lubricants and other materials need to be developed for ultra-low friction and near zero wear. Hard coatings and ion implantation techniques hold promise.


Tribology Issues and Opportunities in MEMS Workshop

Tribology Issues and Opportunities in MEMS Workshop
Author: Bharat Bhushan
Publisher:
Total Pages: 17
Release: 1998
Genre:
ISBN:

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The objective of this workshop was to bring together researchers, manufacturers and potential users of MEMS and experts in tribology (including mechanics, mechanical properties and surface modification) so that the MEMS community could better understand the tribology expertise and the tribology community could better understand the major problems on hand and identify critical research issues facing MEMS industry. There were three specific objectives of the workshop. The first was to provide tutorials on MEMS technology and state of the art of tribology for education of tribology and MEMS community, respectively. The second objective was to share whatever tribological understanding of MEMS devices exists. The third objective was to identify tribology research issues and opportunities and general directions for tribology in MEMS research which were accomplished via breakout sessions and a panel discussion. Since the objective of the first part of the workshop was to provide tutorials, we had a large number of lectures of short durations followed by lectures on tribology of MEMS, mechanical property measurements, modification and characterization of surfaces, and breakout sessions and a panel discussion. A side benefit of this workshop was to bring macro and microtribologists together.


Nano-tribology and Materials in MEMS

Nano-tribology and Materials in MEMS
Author: Sujeet K. Sinha
Publisher: Springer Science & Business Media
Total Pages: 276
Release: 2013-08-27
Genre: Technology & Engineering
ISBN: 3642369359

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This book brings together recent developments in the areas of MEMS tribology, novel lubricants and coatings for nanotechnological applications, biomimetics in tribology and fundamentals of micro/nano-tribology. Tribology plays important roles in the functioning and durability of machines at small length scales because of the problems associated with strong surface adhesion, friction, wear etc. Recently, a number of studies have been conducted to understand tribological phenomena at nano/micro scales and many new tribological solutions for MEMS have been proposed.


Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales

Fundamentals of Tribology and Bridging the Gap Between the Macro- and Micro/Nanoscales
Author: Bharat Bhushan
Publisher: Springer Science & Business Media
Total Pages: 961
Release: 2012-12-06
Genre: Science
ISBN: 9401007365

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The word tribology was fIrst reported in a landmark report by P. Jost in 1966 (Lubrication (Tribology)--A Report on the Present Position and Industry's Needs, Department of Education and Science, HMSO, London). Tribology is the science and technology of two interacting surfaces in relative motion and of related subjects and practices. The popular equivalent is friction, wear and lubrication. The economic impact of the better understanding of tribology of two interacting surfaces in relative motion is known to be immense. Losses resulting from ignorance of tribology amount in the United States alone to about 6 percent of its GNP or about $200 billion dollars per year (1966), and approximately one-third of the world's energy resources in present' use, appear as friction in one form or another. A fundamental understanding of the tribology of the head-medium interface in magnetic recording is crucial to the future growth of the $100 billion per year information storage industry. In the emerging microelectromechanical systems (MEMS) industry, tribology is also recognized as a limiting technology. The advent of new scanning probe microscopy (SPM) techniques (starting with the invention of the scanning tunneling microscope in 1981) to measure surface topography, adhesion, friction, wear, lubricant-fIlm thickness, mechanical properties all on a micro to nanometer scale, and to image lubricant molecules and the availability of supercomputers to conduct atomic-scale simulations has led to the development of a new fIeld referred to as Microtribology, Nanotribology, or Molecular Tribology (see B. Bhushan, J. N. Israelachvili and U.


Handbook of Micro/Nano Tribology

Handbook of Micro/Nano Tribology
Author: Bharat Bushan
Publisher: CRC Press
Total Pages: 1323
Release: 2020-10-28
Genre: Technology & Engineering
ISBN: 1000359506

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This second edition of Handbook of Micro/Nanotribology addresses the rapid evolution within this field, serving as a reference for the novice and the expert alike. Two parts divide this handbook: Part I covers basic studies, and Part II addresses design, construction, and applications to magnetic storage devices and MEMS. Discussions include: surface physics and methods for physically and chemically characterizing solid surfaces roughness characterization and static contact models using fractal analysis sliding at the interface and friction on an atomic scale scratching and wear as a result of sliding nanofabrication/nanomachining as well as nano/picoindentation lubricants for minimizing friction and wear surface forces and microrheology of thin liquid films measurement of nanomechanical properties of surfaces and thin films atomic-scale simulations of interfacial phenomena micro/nanotribology and micro/nanomechanics of magnetic storage devices This comprehensive book contains 16 chapters contributed by more than 20 international researchers. In each chapter, the presentation starts with macroconcepts and then lead to microconcepts. With more than 500 illustrations and 50 tables, Handbook of Micro/Nanotribology covers the range of relevant topics, including characterization of solid surfaces, measurement techniques and applications, and theoretical modeling of interfaces. What's New in the Second Edition? New chapters on: AFM instrumentation Surface forces and adhesion Design and construction of magnetic storage devices Microdynamical devices and systems Mechanical properties of materials in microstructure Micro/nanotribology and micro/nanomechanics of MEMS devices


Nanotribology and Nanomechanics II

Nanotribology and Nanomechanics II
Author: Bharat Bhushan
Publisher: Springer Science & Business Media
Total Pages: 1025
Release: 2011-05-30
Genre: Technology & Engineering
ISBN: 3642152635

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The comprehensive reference and textbook serves as a timely, practical introduction to the principles of nanotribology and nanomechanics. Assuming some familiarity with macroscopic tribology, the book comprises chapters by internationally recognized experts, who integrate knowledge of the field from the mechanics and materials-science perspectives. They cover key measurement techniques, their applications, and theoretical modelling of interfaces, each beginning their contributions with macro- and progressing to microconcepts.


Nanotribology and Nanomechanics

Nanotribology and Nanomechanics
Author: Bharat Bhushan
Publisher: Springer
Total Pages: 930
Release: 2017-04-05
Genre: Technology & Engineering
ISBN: 3319514334

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This textbook and comprehensive reference source and serves as a timely, practical introduction to the principles of nanotribology and nanomechanics. This 4th edition has been completely revised and updated, concentrating on the key measurement techniques, their applications, and theoretical modeling of interfaces. It provides condensed knowledge of the field from the mechanics and materials science perspectives to graduate students, research workers, and practicing engineers.


Tribology of Diamond-like Carbon Films

Tribology of Diamond-like Carbon Films
Author: Christophe Donnet
Publisher: Springer Science & Business Media
Total Pages: 673
Release: 2007-12-06
Genre: Technology & Engineering
ISBN: 0387498915

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This book highlights some of the most important structural, chemical, mechanical and tribological characteristics of DLC films. It is particularly dedicated to the fundamental tribological issues that impact the performance and durability of these coatings. The book provides reliable and up-to-date information on available industrial DLC coatings and includes clear definitions and descriptions of various DLC films and their properties.


Modern Tribology Handbook, Two Volume Set

Modern Tribology Handbook, Two Volume Set
Author: Bharat Bhushan
Publisher: CRC Press
Total Pages: 1760
Release: 2000-12-28
Genre: Technology & Engineering
ISBN: 0849377870

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Recent research has led to a deeper understanding of the nature and consequences of interactions between materials on an atomic scale. The results have resonated throughout the field of tribology. For example, new applications require detailed understanding of the tribological process on macro- and microscales and new knowledge guides the rational