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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors

Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors
Author: Toan Dinh
Publisher: Springer
Total Pages: 115
Release: 2018-10-05
Genre: Technology & Engineering
ISBN: 9811325715

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This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.


Thermal Sensors

Thermal Sensors
Author: Chandra Mohan Jha
Publisher: Springer
Total Pages: 139
Release: 2015-04-15
Genre: Technology & Engineering
ISBN: 1493925814

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This book is a comprehensive guide to both the fundamentals of thermal sensors and their advanced functions. Key topics include sensor materials, CMOS-compatible sensors, measurement capabilities, thermal management and manufacturing processes. The introductory chapter covers the basic principles of thermal sensors from the essentials of heat transfer to smart wireless sensors. Later chapters illustrate the wide range of thermal sensor uses, from microprocessor thermal sensing to energy converter applications. Modeling and simulation techniques are used to explain the future direction of the field. Designed for researchers and practitioners working with wireless sensors and thermal management, Thermal Sensors: Principles and Applications for Semiconductor Industries is a valuable reference to the benefits and challenges these sensors offer. Advanced-level students studying mechanical or electrical engineering and networks will also find the content useful.


Radiation Effect on SiC Piezoresistive Pressure Sensor

Radiation Effect on SiC Piezoresistive Pressure Sensor
Author: Peilai Zhang
Publisher:
Total Pages: 236
Release: 2008
Genre: Pressure transducers
ISBN:

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Abstract: SiC piezoresistive pressure sensors were developed at NASA Glenn Research Center for high temperature applications. They have demonstrated good sensing capabilities up to 600°C. The wide band gap of SiC, its high thermal conductivity and high radiation resistance, compared to other conventional semiconductor materials, makes piezoresistive pressure sensors suitable for high radiation environments. In this thesis, the performance of the SiC piezoresistive pressure has been evaluated in gamma and mixed gamma/neutron irradiation fields.


MEMS

MEMS
Author: Mohamed Gad-el-Hak
Publisher: CRC Press
Total Pages: 576
Release: 2005-11-29
Genre: Technology & Engineering
ISBN: 1420036556

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As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection


Thermal Sensors,

Thermal Sensors,
Author: Gerard C. M. Meijer
Publisher: CRC Press
Total Pages: 328
Release: 1994-10-27
Genre: Art
ISBN:

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Thermal Sensors is intended as a comprehensive and accessible reference for designers and users of thermal sensors. Many different physical quantities can be converted easily and accurately into temperature differences using thermal techniques. These temperature differences can be detected with temperature and temperature-difference sensors. In a thermal sensor the thermal converter and the temperature sensor are combined in a single accurate device. This book gives an overview and deals with the design aspects of thermal and temperature sensors, with an emphasis on sensors based on silicon technology. The temperature sensors described are based on the use of various types of sensitive elements, such as platinum resistors, thermistors and special integrated circuits. The thermal sensors described include flow, conductivity, infrared, vacuum, humidity and calorimetric sensors, and ac-dc converters, thus providing a comprehensive overview of all thermal sensors, with practical examples of each type.


From MEMS to Bio-MEMS and Bio-NEMS

From MEMS to Bio-MEMS and Bio-NEMS
Author: Marc J. Madou
Publisher: CRC Press
Total Pages: 652
Release: 2011-06-13
Genre: Technology & Engineering
ISBN: 142005516X

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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms. Details the Nanotechnology, Biology, and Manufacturing Techniques Applicable to Bionanotechnology Topics include: Nonlithography manufacturing techniques with lithography-based methods Nature as an engineering guide and contrasts top-down and bottom-up approaches Packaging, assembly, and self-assembly from ICs to DNA and biological cells Selected new MEMS and NEMS processes and materials, metrology techniques, and modeling Scaling laws, actuators, power generation, and the implementation of brains in miniaturizes devices Different strategies for making micromachines smarter The transition out of the laboratory and into the marketplace The third volume in Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set, the book discusses top-down and bottom-up manufacturing methods and explains how to use nature as a guide. It provides a better understanding of how to match different manufacturing options with a given application that students can use to identify additional killer MEMS and NEMS applications. Other volumes in the set include: Solid-State Physics, Fluidics, and Analytical Techniques in Micro- and Nanotechnology Manufacturing Techniques for Microfabrication and Nanotechnology


Ultra-High Temperature Sensors Based on Optical Property

Ultra-High Temperature Sensors Based on Optical Property
Author:
Publisher:
Total Pages:
Release: 2008
Genre:
ISBN:

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In this program, Nuonics, Inc. has studied the fundamentals of a new Silicon Carbide (SiC) materials-based optical sensor technology suited for extreme environments of coal-fired engines in power production. The program explored how SiC could be used for sensing temperature, pressure, and potential gas species in a gas turbine environment. The program successfully demonstrated the optical designs, signal processing and experimental data for enabling both temperature and pressure sensing using SiC materials. The program via its sub-contractors also explored gas species sensing using SiC, in this case, no clear commercially deployable method was proven. Extensive temperature and pressure measurement data using the proposed SiC sensors was acquired to 1000 deg-C and 40 atms, respectively. Importantly, a first time packaged all-SiC probe design was successfully operated in a Siemens industrial turbine rig facility with the probe surviving the harsh chemical, pressure, and temperature environment during 28 days of test operations. The probe also survived a 1600 deg-C thermal shock test using an industrial flame.


High Temperature Materials and Mechanisms

High Temperature Materials and Mechanisms
Author: Yoseph Bar-Cohen
Publisher: CRC Press
Total Pages: 586
Release: 2014-03-03
Genre: Science
ISBN: 1466566450

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The use of high-temperature materials in current and future applications, including silicone materials for handling hot foods and metal alloys for developing high-speed aircraft and spacecraft systems, has generated a growing interest in high-temperature technologies. High Temperature Materials and Mechanisms explores a broad range of issues related to high-temperature materials and mechanisms that operate in harsh conditions. While some applications involve the use of materials at high temperatures, others require materials processed at high temperatures for use at room temperature. High-temperature materials must also be resistant to related causes of damage, such as oxidation and corrosion, which are accelerated with increased temperatures. This book examines high-temperature materials and mechanisms from many angles. It covers the topics of processes, materials characterization methods, and the nondestructive evaluation and health monitoring of high-temperature materials and structures. It describes the application of high temperature materials to actuators and sensors, sensor design challenges, as well as various high temperature materials and mechanisms applications and challenges. Utilizing the knowledge of experts in the field, the book considers the multidisciplinary nature of high temperature materials and mechanisms, and covers technology related to several areas including energy, space, aerospace, electronics, and metallurgy. Supplies extensive references at the end of each chapter to enhance further study Addresses related science and engineering disciplines Includes information on drills, actuators, sensors and more A comprehensive resource of information consolidated in one book, this text greatly benefits students in materials science, aerospace and mechanical engineering, and physics. It is also an ideal resource for professionals in the industry.