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System-level Modeling of MEMS

System-level Modeling of MEMS
Author: Oliver Brand
Publisher: John Wiley & Sons
Total Pages: 562
Release: 2012-12-20
Genre: Technology & Engineering
ISBN: 3527647120

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System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.


MEMS Mechanical Sensors

MEMS Mechanical Sensors
Author: Stephen Beeby
Publisher: Artech House
Total Pages: 282
Release: 2004
Genre: Technology & Engineering
ISBN: 9781580538732

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Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.


Microelectromechanical Systems and Devices

Microelectromechanical Systems and Devices
Author: Nazmul Islam
Publisher: BoD – Books on Demand
Total Pages: 496
Release: 2012-03-28
Genre: Science
ISBN: 9535103067

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The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.


Optimal Synthesis Methods for MEMS

Optimal Synthesis Methods for MEMS
Author: S.G.K. Ananthasuresh
Publisher: Springer Science & Business Media
Total Pages: 326
Release: 2012-12-06
Genre: Technology & Engineering
ISBN: 1461504872

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The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.


RF MEMS Switches and Integrated Switching Circuits

RF MEMS Switches and Integrated Switching Circuits
Author: Ai-Qun Liu
Publisher: Springer Science & Business Media
Total Pages: 276
Release: 2010-08-09
Genre: Technology & Engineering
ISBN: 0387462627

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Microelectromechanical Systems (MEMS) stand poised for the next major breakthrough in the silicon revolution that began with the transistor in the 1960s and has revolutionized microelectronics. MEMS allow one to not only observe and process information of all types from small scale systems, but also to affect changes in systems and the environment at that scale. “RF MEMS Switches and Integrated Switching Circuits” builds on the extensive body of literature that exists in research papers on analytical and numerical modeling and design based on RF MEMS switches and micromachined switching circuits, and presents a unified framework of coverage. This volume includes, but is not limited to, RF MEMS approaches, developments from RF MEMS switches to RF switching circuits, and MEMS switch components in circuit systems. This book also: -Presents RF Switches and switching circuit MEMS devices in a unified framework covering all aspects of engineering innovation, design, modeling, fabrication, control and experimental implementation -Discusses RF switch devices in detail, with both system and component-level circuit integration using micro- and nano-fabrication techniques -Includes an emphasis on design innovation and experimental relevance rather than basic electromagnetic theory and device physics “RF MEMS Switches and Integrated Switching Circuits” is perfect for engineers, researchers and students working in the fields of MEMS, circuits and systems and RFs.


Microelectromechanical Systems

Microelectromechanical Systems
Author: Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
Publisher: National Academies Press
Total Pages: 76
Release: 1997-12-15
Genre: Technology & Engineering
ISBN: 0309591511

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Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival--perhaps surpass--the societal impact of integrated circuits.


Nanotechnology for Telecommunications

Nanotechnology for Telecommunications
Author: Sohail Anwar
Publisher: CRC Press
Total Pages: 453
Release: 2017-12-19
Genre: Technology & Engineering
ISBN: 1420053272

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With its unique promise to revolutionize science, engineering, technology, and other fields, nanotechnology continues to profoundly impact associated materials, components, and systems, particularly those used in telecommunications. These developments are leading to easier convergence of related technologies, massive storage data, compact storage devices, and higher-performance computing. Nanotechnology for Telecommunications presents vital technical scientific information to help readers grasp issues and challenges associated with nanoscale telecommunication system development and commercialization—and then avail themselves of the many opportunities to be gleaned. This book provides technical information and research ideas regarding the use of nanotechnology in telecommunications and information processing, reflecting the continuing trend toward the use of optoelectronics. Nanotech will eventually lead to a technology cluster that offers a complete range of functionalities for systems used in domains including information, energy, construction, environmental, and biomedical. Describing current and future developments that hold promise for significant innovations in telecommunications, this book is organized to provide a progressive understanding of topics including: Background information on nanoscience and nanotechnology Specific applications of nanotechnology in telecommunications Nanostructured optoelectronic materials MEMS, NEMS, and their applications in communication systems Quantum dot Cellular Automata (QCA) and its applications in telecommunication systems How nonohmic nonlinear behavior affects both digital and analog signal processing Concepts regarding quantum switching and its applications in quantum networks The scale of the physical systems that use nanoscale electronic devices is still large, and that presents serious challenges to the establishment of interconnections between nanoscale devices and the outside world. Also addressing consequent social implications of nanotech, this book reviews a broad range of the nano concepts and their influence on every aspect of telecommunications. It describes the different levels of interconnections in systems and details the standardized assembly process for a broad specrum of micro-, nano-, bio-, fiber-optic, and optoelectronic components and functions. This book is a powerful tool for understanding how to harness the power of nanotech through integration of materials, processes, devices, and applications.


MOEMS

MOEMS
Author: M. Edward Motamedi
Publisher: SPIE Press
Total Pages: 640
Release: 2005
Genre: Technology & Engineering
ISBN: 9780819450210

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This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.


Fast Simulation of Electro-Thermal MEMS

Fast Simulation of Electro-Thermal MEMS
Author: Tamara Bechtold
Publisher: Springer Science & Business Media
Total Pages: 185
Release: 2006-11-01
Genre: Technology & Engineering
ISBN: 3540346139

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This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.


Smart Systems Integration and Simulation

Smart Systems Integration and Simulation
Author: Nicola Bombieri
Publisher: Springer
Total Pages: 239
Release: 2016-02-17
Genre: Technology & Engineering
ISBN: 3319273922

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This book-presents new methods and tools for the integration and simulation of smart devices. The design approach described in this book explicitly accounts for integration of Smart Systems components and subsystems as a specific constraint. It includes methodologies and EDA tools to enable multi-disciplinary and multi-scale modeling and design, simulation of multi-domain systems, subsystems and components at all levels of abstraction, system integration and exploration for optimization of functional and non-functional metrics. By covering theoretical and practical aspects of smart device design, this book targets people who are working and studying on hardware/software modelling, component integration and simulation under different positions (system integrators, designers, developers, researchers, teachers, students etc.). In particular, it is a good introduction to people who have interest in managing heterogeneous components in an efficient and effective way on different domains and different abstraction levels. People active in smart device development can understand both the current status of practice and future research directions. · Provides a comprehensive overview of smart systems design, focusing on design challenges and cutting-edge solutions; · Enables development of a co-simulation and co-design environment that accounts for the peculiarities of the basic subsystems and components to be integrated; · Describes development of modeling and design techniques, methods and tools that enable multi-domain simulation and optimization at various levels of abstraction and across different technological domains.