Synthesis Microstructural Characterization And Properties Of Thin Film Materials For Applications In High Frequency Bulk Acoustic Wave Devices PDF Download

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Thin Film Bulk Acoustic Wave Devices

Thin Film Bulk Acoustic Wave Devices
Author: Tuomas Pensala
Publisher:
Total Pages:
Release: 2011
Genre: Radio filters
ISBN: 9789513877224

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Thin film bulk acoustic wave (BAW) resonators and filters operating in the GHz range are used in mobile phones for the most demanding filtering applications and complement the surface acoustic wave (SAW) based filters. Their main advantages are small size and high performance at frequencies above 2 GHz. This work concentrates on the characterization, performance optimization, and modelling techniques of thin film BAW devices. Laser interferometric vibration measurements together with plate wave dispersion modeling are used to extract the full set of elastic material parameters for sputter deposited ZnO, demonstrating a method for obtaining material data needed for accurate simulation of the devices. The effectiveness of the acoustic interference reflector used to isolate the vibration from the substrate is studied by 1-D modeling, 2-D finite element method and by electrical and laser interferometric measurements. It is found that the Q-value of reflector-based BAW resonators operating at 2 GHz is limited to approximately 2000 by mechanisms other than leakage through the reflector. Suppression of spurious resonances in ZnO resonators is studied in depth by modeling and measurements. It is verified that the approximate mode orthogonality is behind the suppression in boundary frame type ZnO devices operating in the piston mode, but also another narrow band mode suppression mechanism is found. A plate wave dispersion based 2-D simulation scheme for laterally acoustically coupled BAW resonator filters is developed and employed in designing of experimental devices, which show both good agreement with the model predictions and a remarkable 4.9 % relative bandwidth.


Microstructural Characterization of Materials

Microstructural Characterization of Materials
Author: David Brandon
Publisher: John Wiley & Sons
Total Pages: 517
Release: 2013-03-21
Genre: Technology & Engineering
ISBN: 1118681487

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Microstructural characterization is usually achieved by allowing some form of probe to interact with a carefully prepared specimen. The most commonly used probes are visible light, X-ray radiation, a high-energy electron beam, or a sharp, flexible needle. These four types of probe form the basis for optical microscopy, X-ray diffraction, electron microscopy, and scanning probe microscopy. Microstructural Characterization of Materials, 2nd Edition is an introduction to the expertise involved in assessing the microstructure of engineering materials and to the experimental methods used for this purpose. Similar to the first edition, this 2nd edition explores the methodology of materials characterization under the three headings of crystal structure, microstructural morphology, and microanalysis. The principal methods of characterization, including diffraction analysis, optical microscopy, electron microscopy, and chemical microanalytical techniques are treated both qualitatively and quantitatively. An additional chapter has been added to the new edition to cover surface probe microscopy, and there are new sections on digital image recording and analysis, orientation imaging microscopy, focused ion-beam instruments, atom-probe microscopy, and 3-D image reconstruction. As well as being fully updated, this second edition also includes revised and expanded examples and exercises, with a solutions manual available at http://develop.wiley.co.uk/microstructural2e/ Microstructural Characterization of Materials, 2nd Edition will appeal to senior undergraduate and graduate students of material science, materials engineering, and materials chemistry, as well as to qualified engineers and more advanced researchers, who will find the book a useful and comprehensive general reference source.


Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
Author: O. Auciello
Publisher: Springer Science & Business Media
Total Pages: 625
Release: 2012-12-06
Genre: Technology & Engineering
ISBN: 9401117276

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The synthesis of multicomponent/multilayered superconducting, conducting, semiconducting and insulating thin films has become the subject of an intensive, worldwide, interdisciplinary research effort. The development of deposition-characterization techniques and the science and technology related to the synthesis of these films are critical for the successful evolution of this interdisciplinary field of research and the implementation of the new materials in a whole new generation of advanced microdevices. This book contains the lectures and contributed papers on various scientific and technological aspects of multicomponent and multilayered thin films presented at a NATO/ASI. Compared to other recent books on thin films, the distinctive character of this book is the interdisciplinary treatment of the various fields of research related to the different thin film materials mentioned above. The wide range of topics discussed in this book include vacuum-deposition techniques, synthesis-processing, characterization, and devices of multicomponent/multilayered oxide high temperature superconducting, ferroelectric, electro-optic, optical, metallic, silicide, and compound semiconductor thin films. The book presents an unusual intedisciplinary exchange of ideas between researchers with cross-disciplinary backgrounds and it will be useful to established investigators as well as postdoctoral and graduate students.


Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators
Author: Yafei Zhang
Publisher: Springer Science & Business Media
Total Pages: 159
Release: 2012-08-28
Genre: Technology & Engineering
ISBN: 3642317766

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Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.