Sputtered Aluminium Oxide And Amorphous Silicon For Silicon Solar Cells PDF Download
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Author | : Xinyu Zhang |
Publisher | : |
Total Pages | : 0 |
Release | : 2015 |
Genre | : |
ISBN | : |
Download Sputtered Aluminium Oxide and Amorphous Silicon for Silicon Solar Cells Book in PDF, ePub and Kindle
High-efficiency silicon solar cells have been attracting an increased interest in recent years. Surface passivation is essential for various types of high-performance solar cells, particularly when thinner silicon wafers are used to reduce the material cost. Passivating dielectric thin films have been widely studied and used in solar cells designs, these include atomic-layer deposited (ALD) aluminium oxide, plasma-enhanced chemical vapour deposited (PECVD) silicon nitride and PECVD intrinsic amorphous silicon. The aim of this thesis is to develop and optimise an alternative deposition method for surface passivating films: sputtering. Sputtering is especially attractive for industrial production, due to its high throughput, easy and safe operation and global cost-effectiveness. This thesis has focussed on optimising the reactive sputtering of aluminium oxide, using an aluminium target, and the non-reactive sputtering of amorphous silicon, using a silicon target. A key innovation has been the addition of hydrogen to the mix of gasses that form the plasma, which permits to incorporate hydrogen into the films, leading to a significantly improved surface passivation quality compared to non-hydrogenated films. We have achieved the best surface passivation results by sputtered aluminium oxide to date, with an effective surface recombination velocity of 1 cm/s on 1.5 ohm-cm n-type silicon. This result is similar to the SRV of 0.9 cm/s measured on aluminium oxide films deposited by PA-ALD on the same substrates. Good passivation was also achieved on p-type silicon. The investigations into the reactive sputtering process have shown that the film properties are closely related to the oxidation level of the aluminium target, which can be controlled by adjusting process parameters. It has also been found that the presence of hydrogen in the plasma is beneficial for establishing the optimum conditions of the deposition; not only does the surface passivation quality improve, but the reactive sputtering process becomes easier to control as well.We have also shown - for the first time - that intrinsic amorphous silicon (a-Si:H) films by sputtering deposition are capable of providing an excellent passivation of crystalline silicon surfaces. A SRV of 1.5 cm/s on 1.5 ohm-cm n-type silicon and SRV of 9 cm/s on 1 ohm-cm p-type silicon have been achieved, which are comparable to the commonly used PECVD deposited a-Si:H films. After investigating the film properties using Fourier Transform Infrared Spectroscopy (FTIR), we observe that our sputtered a-Si:H films have a characteristic signature in terms of chemical bonding configurations, where several types of silicon-hydrogen bonds exist. From those measurements we have estimated that there is approximately a 4% hydrogen concentration in the films, sufficient to achieve excellent surface passivation. Finally, the thesis also presents initial attempts at developing doped amorphous silicon films, which could enable the development of an all-sputtered silicon heterojunction solar cell technology. Lightly doped a-Si:H films were deposited using a 1% boron doped silicon target and a 0.01% phosphorus doped silicon target. We have found an appropriate way to avoid surface passivation degradation caused by the doped layer deposition onto an intrinsic a-Si:H layer.
Author | : Albert M. Estevez |
Publisher | : |
Total Pages | : 202 |
Release | : 2003 |
Genre | : Aluminum |
ISBN | : |
Download Fabrication of Polycrystalline Si Solar Cells Via Aluminum Induced Crystallization of Sputtered and Plasma Enhanced Chemical Vapor Deposited Amorphous Silicon Book in PDF, ePub and Kindle
Author | : David Emil Carlson |
Publisher | : |
Total Pages | : 52 |
Release | : 1979 |
Genre | : |
ISBN | : |
Download Amorphous-silicon solar cells Book in PDF, ePub and Kindle
Author | : Sandra Schicho |
Publisher | : Forschungszentrum Jülich |
Total Pages | : 219 |
Release | : 2011 |
Genre | : |
ISBN | : 3893366938 |
Download Amorphous and Microcrystalline Silicon Applied in Very Thin Tandem Solar Cells Book in PDF, ePub and Kindle
Author | : Ruud E.I. Schropp |
Publisher | : Springer |
Total Pages | : 215 |
Release | : 2016-07-18 |
Genre | : Technology & Engineering |
ISBN | : 1461556317 |
Download Amorphous and Microcrystalline Silicon Solar Cells: Modeling, Materials and Device Technology Book in PDF, ePub and Kindle
Amorphous silicon solar cell technology has evolved considerably since the first amorphous silicon solar cells were made at RCA Laboratories in 1974. Scien tists working in a number of laboratories worldwide have developed improved alloys based on hydrogenated amorphous silicon and microcrystalline silicon. Other scientists have developed new methods for growing these thin films while yet others have developed new photovoltaic (PV) device structures with im proved conversion efficiencies. In the last two years, several companies have constructed multi-megawatt manufacturing plants that can produce large-area, multijunction amorphous silicon PV modules. A growing number of people be lieve that thin-film photovoltaics will be integrated into buildings on a large scale in the next few decades and will be able to make a major contribution to the world's energy needs. In this book, Ruud E. I. Schropp and Miro Zeman provide an authoritative overview of the current status of thin film solar cells based on amorphous and microcrystalline silicon. They review the significant developments that have occurred during the evolution of the technology and also discuss the most im portant recent innovations in the deposition of the materials, the understanding of the physics, and the fabrication and modeling of the devices.
Author | : F. A. Benson |
Publisher | : |
Total Pages | : 49 |
Release | : 1985 |
Genre | : |
ISBN | : |
Download Development of RF Sputtered Thin Film Amorphous Silicon Towards a P-I-N Solar Cell Book in PDF, ePub and Kindle
Author | : Wendi Zhang |
Publisher | : Forschungszentrum Jülich |
Total Pages | : 215 |
Release | : 2013 |
Genre | : |
ISBN | : 3893368647 |
Download Ion Beam Treatment of Functional Layers in Thin-film Silicon Solar Cells Book in PDF, ePub and Kindle
Author | : Eberhard F. Krimmel |
Publisher | : Springer Science & Business Media |
Total Pages | : 417 |
Release | : 2013-11-11 |
Genre | : Technology & Engineering |
ISBN | : 3662099012 |
Download Si Silicon Book in PDF, ePub and Kindle
This is the first of three Gmelin Handbook volumes in the silicon se ries that will cover silicon nitride, a normaUy solid material with the idealized formula Si N . This volume, 3 4 "Silicon" Supplement Volume B Sc, is devoted to applications of silicon nitride in microelec tronics and solar ceUs. The compendium is the product of a critical selection among more than 17600 publications on silicon nitride issued up to January 1990. Out of a total of 5900 publications dealing with the fabrication and use of microelectronic devices (including 2400 Japanese patent applications), about 4000 papers have been selected for this volume. The current volume is grouped into three parts. Chapters 2 to 8 deal with general, non specific microelectronic applications of silicon nitride, Chapters 9 to 31 cover applications of silicon nitride in specific devices and device components, and Chapter 32 is devoted exclusively to applications in solar ceUs, including information on our general understanding of the role of silicon nitride in photovoltaic devices. Experimental results on the preparation of silicon nitride layers for application in unspeci fied devices are in Chapter 2. Whenever the preparation is in connection with specific devices, the information is presented in the respective chapters. The general preparation of silicon nitride layers is not covered in this volume, but will appear in "Silicon" Supplement Volume B 5a. See also the Introductory Remarks, Chapter 1, p. 1.
Author | : M. G. Hack |
Publisher | : |
Total Pages | : |
Release | : 1980 |
Genre | : |
ISBN | : |
Download Radio-frequency Sputtered Amorphous Silicon for Use in Solar Cells Book in PDF, ePub and Kindle
Author | : Florian Werner |
Publisher | : |
Total Pages | : 202 |
Release | : 2014 |
Genre | : |
ISBN | : 9783844030396 |
Download Atomic Layer Deposition of Aluminum Oxide on Crystalline Silicon Book in PDF, ePub and Kindle