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Semiconductor Microchips and Fabrication

Semiconductor Microchips and Fabrication
Author: Yaguang Lian
Publisher: John Wiley & Sons
Total Pages: 324
Release: 2022-10-18
Genre: Technology & Engineering
ISBN: 1119867789

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Semiconductor Microchips and Fabrication Advanced and highly illustrated guide to semiconductor manufacturing from an experienced industry insider Semiconductor Microchips and Fabrication is a practical yet advanced book on the theory, design, and manufacturing of semiconductor microchips that describes the process using the principles of physics and chemistry, fills in the knowledge gaps for professionals and students who need to know how manufacturing equipment works, and provides valuable suggestions and solutions to many problems that students or engineers often encounter in semiconductor processing, including useful experiment results to help in process work. The explanation of the semiconductor manufacturing process, and the equipment needed, is carried out based on the machines that are used in clean rooms over the world so readers understand how they can use the equipment to achieve their design and manufacturing ambitions. Combining theory with practice, all descriptions are carried out around the actual equipment and processes by way of a highly visual text, with illustrations including equipment pictures, manufacturing process schematics, and structures of semiconductor microchips. Sample topics covered in Semiconductor Microchips and Fabrication include: An introduction to basic concepts, such as impedance mismatch from plasma machines and theories, such as energy bands and Clausius-Clapeyron equation Basic knowledge used in semiconductor devices and manufacturing machines, including DC and AC circuits, electric fields, magnetic fields, resonant cavity, and the components used in the devices and machines Transistor and integrated circuits, including bipolar transistors, junction field effect transistors, and metal-semiconductor field effect transistors The main processes used in the manufacturing of microchips, including lithography, metallization, reactive-ion etching (RIE), plasma-enhanced chemical vapor deposition (PECVD), thermal oxidation and implantation, and more The skills in the design and problem solving of processes, such as how to design a dry etching recipe, and how to solve the micro-grass problems in Bosch process Through Semiconductor Microchips and Fabrication, readers can obtain the fundamental knowledge and skills of semiconductor manufacturing, which will help them better understand and use semiconductor technology to improve their product quality or project research. Before approaching this text, readers should have basic knowledge of physics, chemistry, and circuitry.


Microchip Fabrication, 5th Ed.

Microchip Fabrication, 5th Ed.
Author: Peter Van Zant
Publisher: McGraw Hill Professional
Total Pages: 658
Release: 2004-06-09
Genre: Technology & Engineering
ISBN: 0071501398

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The #1 book in the industry for more than 15 years! Utilizing a straightforward, math-free pathology, this is a novice-friendly guide to the semiconductor fabrication process from raw materials through shipping the finished, packaged device. Challenging quizzes and review summaries make this the perfect learning guide for technicians in training. * NEW chapter on nanotechnology * NEW sections on 300mm wafer processing * Processes and devices, and Green processing * Every chapter updated to reflect the latest processing techniques


Microchip Fabrication

Microchip Fabrication
Author: Peter Van Zant
Publisher:
Total Pages: 322
Release: 1984
Genre: Integrated circuits
ISBN:

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Making Microchips

Making Microchips
Author: Jan Mazurek
Publisher: MIT Press
Total Pages: 266
Release: 1998-12-07
Genre: Science
ISBN: 9780262263641

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An examination of the environmental and economic implications of the computer microchip industry's exodus from California's Silicon Valley to New Mexico, Virginia, Ireland, and Taiwan. In Making Microchips, Jan Mazurek examines the environmental and economic implications of the computer microchip industry's exodus from California's Silicon Valley to New Mexico, Virginia, Ireland, and Taiwan. Globalization, economic restructuring, and changing manufacturing processes in this rapidly growing industry present difficult new questions for environmental policy. Mazurek challenges the assumptions of U.S. policies designed to promote the competitiveness of domestic microchip makers. She argues that, although these initiatives focus on the economic effects of environmental regulation, they fail to acknowledge how economic and organizational changes within the industry collide with and often confound efforts to monitor and manage pollution from chemicals used in microchip manufacturing. Despite its reputation as a clean industry, microchip manufacturing is fraught with hazards. More than sixty dangerous acids, solvents, caustics, and gases are used to make microchips, and some of them are suspected to be carcinogens and/or reproductive toxins. Mazurek describes the environmental by-products of chipmaking, including soil contamination, air and water pollution, and damage to human health. Applying insights from economic geography to questions of how and where companies organize production, she shows how Silicon Valley played a pivotal role in the development of the microchip. Pairing federal environmental data with structural and geographic information on the six firms that continue to build wafer fabrication plants in the United States, she demonstrates how reorganization and relocation of manufacturing facilities divert attention from trends in toxic emissions and how they complicate public and private efforts to improve the industry's environmental performance. In the concluding chapter, Mazurek marshals her findings in a broader analysis of the expansion of global manufacturing and the resultant environmental problems.


Microchip Fabrication

Microchip Fabrication
Author: Peter Van Zant
Publisher: McGraw-Hill Companies
Total Pages: 656
Release: 1997
Genre: Technology & Engineering
ISBN:

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s an easy-to-follow introduction to semiconductor fabrication that proceeds from basic materials and process chemicals to chip packaging procedures. New methods and data related to packaging, memory circuits, and semiconductor devices are key updates in this new edition.


Fundamentals of Semiconductor Manufacturing and Process Control

Fundamentals of Semiconductor Manufacturing and Process Control
Author: Gary S. May
Publisher: John Wiley & Sons
Total Pages: 428
Release: 2006-05-26
Genre: Technology & Engineering
ISBN: 0471790273

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A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.


Microchip Manufacturing

Microchip Manufacturing
Author: Stanley Wolf
Publisher:
Total Pages: 564
Release: 2003
Genre: Technology & Engineering
ISBN: 9780961672188

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History of Semiconductor Engineering

History of Semiconductor Engineering
Author: Bo Lojek
Publisher: Springer Science & Business Media
Total Pages: 394
Release: 2007-07-28
Genre: Science
ISBN: 3540342583

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This book provides a unique account of the history of integrated circuit, the microelectronics industry and the people involved in the development of transistor and integrated circuit. In this richly illustrated account the author argues that the group of inventors was much larger than originally thought. This is a personal recollection providing the first comprehensive behind-the-scenes account of the history of the integrated circuit.


Microchip Fabrication

Microchip Fabrication
Author: Peter Van Zant
Publisher:
Total Pages: 278
Release: 1984-08-01
Genre: Technology & Engineering
ISBN: 9780961388003

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Novice-friendly intro to semiconductor processing.The most readable and comprehensive guide to semiconductorprocessing, Peter Van Zant's Microchip Fabrication is considered the bible of basic microchip technology. Now in an updated new fourth edition, this completely math-free introduction to a complex field is an efficient tool for high-powered engineers and technology-clueless salespeople alike. You'll find fully illuminating, easy-reading explanations of semiconductor materials and process chemicals...contamination control...process yields...all aspects of basic patterning....doping,deposition, and metallization...wafer, device, and circuit evaluation...semiconductor devices and integrated circuit formation and types...and packaging. This new fourth edition puts at your fingertips new sections on: *Copper metallization and damascene patterning *BGA and CSP* Cutting-edge cleaning techniques *And more!


Semiconductor Manufacturing Handbook

Semiconductor Manufacturing Handbook
Author: Hwaiyu Geng
Publisher: McGraw Hill Professional
Total Pages: 915
Release: 2005-05-18
Genre: Technology & Engineering
ISBN: 0071445595

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WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems