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Self-Powered and Soft Polymer MEMS/NEMS Devices

Self-Powered and Soft Polymer MEMS/NEMS Devices
Author: Ajay Giri Prakash Kottapalli
Publisher: Springer
Total Pages: 85
Release: 2019-02-28
Genre: Technology & Engineering
ISBN: 303005554X
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This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of various energy harvesting principles, such as electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive. This multidisciplinary book is appropriate for students and professionals in the fields of material science, mechanical engineering, electrical engineering, and bioengineering.

Mems/Nems

Mems/Nems
Author: Cornelius T. Leondes
Publisher: Springer Science & Business Media
Total Pages: 2142
Release: 2007-10-08
Genre: Technology & Engineering
ISBN: 0387257861
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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Design and Fabrication of Self-Powered Micro-Harvesters

Design and Fabrication of Self-Powered Micro-Harvesters
Author: C. T. Pan
Publisher: John Wiley & Sons
Total Pages: 344
Release: 2014-04-09
Genre: Technology & Engineering
ISBN: 1118487826
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Presents the latest methods for designing and fabricating self-powered micro-generators and energy harvester systems Design and Fabrication of Self-Powered Micro-Harvesters introduces the latest trends of self-powered generators and energy harvester systems, including the design, analysis and fabrication of micro power systems. Presented in four distinct parts, the authors explore the design and fabrication of: vibration-induced electromagnetic micro-generators; rotary electromagnetic micro-generators; flexible piezo-micro-generator with various widths; and PVDF electrospunpiezo-energy with interdigital electrode. Focusing on the latest developments of self-powered microgenerators such as micro rotary with LTCC and filament winding method, flexible substrate, and piezo fiber-typed microgenerator with sound organization, the fabrication processes involved in MEMS and nanotechnology are introduced chapter by chapter. In addition, analytical solutions are developed for each generator to help the reader to understand the fundamentals of physical phenomena. Fully illustrated throughout and of a high technical specification, it is written in an accessible style to provide an essential reference for industry and academic researchers. Comprehensive treatment of the newer harvesting devices including vibration-induced and rotary electromagnetic microgenerators, polyvinylidene fluoride (PVDF) nanoscale/microscale fiber, and piezo-micro-generators Presents innovative technologies including LTCC (low temperature co-fire ceramic) processes, and PCB (printed circuit board) processes Offers interdisciplinary interest in MEMS/NEMS technologies, green energy applications, bio-related sensors, actuators and generators Presented in a readable style describing the fundamentals, applications and explanations of micro-harvesters, with full illustration

Materials and Failures in MEMS and NEMS

Materials and Failures in MEMS and NEMS
Author: Atul Tiwari
Publisher: John Wiley & Sons
Total Pages: 435
Release: 2015-09-11
Genre: Technology & Engineering
ISBN: 1119083869
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The fabrication of MEMS has been predominately achieved by etching the polysilicon material. However, new materials are in large demands that could overcome the hurdles in fabrication or manufacturing process. Although, an enormous amount of work being accomplished in the area, most of the information is treated as confidential or privileged. It is extremely hard to find the meaningful information for the new or related developments. This book is collection of chapters written by experts in MEMS and NEMS technology. Chapters are contributed on the development of new MEMS and NEMS materials as well as on the properties of these devices. Important properties such as residual stresses and buckling behavior in the devices are discussed as separate chapters. Various models have been included in the chapters that studies the mode and mechanism of failure of the MEMS and NEMS. This book is meant for the graduate students, research scholars and engineers who are involved in the research and developments of advanced MEMS and NEMS for a wide variety of applications. Critical information has been included for the readers that will help them in gaining precise control over dimensional stability, quality, reliability, productivity and maintenance in MEMS and NEMS. No such book is available in the market that addresses the developments and failures in these advanced devices.

Mems for Biomedical Applications

Mems for Biomedical Applications
Author: Shekhar Bhansali
Publisher: Elsevier
Total Pages: 511
Release: 2012-07-18
Genre: Technology & Engineering
ISBN: 0857096273
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The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology.The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS.With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

Soft Actuators

Soft Actuators
Author: Kinji Asaka
Publisher: Springer
Total Pages: 492
Release: 2014-11-17
Genre: Technology & Engineering
ISBN: 4431547673
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The subject of this book is the current comprehensive research and development of soft actuators, and encompasses interdisciplinary studies of materials science, mechanics, electronics, robotics and bioscience. As an example, the book includes current research on actuators based on biomaterials to provide future perspectives for artificial muscle technology. Readers can obtain detailed, useful information about materials, methods of synthesis, fabrication and measurements. The topics covered here not only promote further research and development of soft actuators but also lead the way to their utilization and industrialization. One outstanding feature of the book is that it contains many color figures, diagrams and photographs clearly describing the mechanism, apparatus and motion of soft actuators. The chapter on modeling is conducive to more extensive design work in materials and devices and is especially useful in the development of practical applications. Readers can acquire the newest technology and information about the basic science and practical applications of flexible, lightweight and noiseless soft actuators, which are quite unlike conventional mechanical engines and electric motors. The new ideas offered in this volume will provide inspiration and encouragement to researchers and developers as they explore new fields of applications for soft actuators.

Outlook and Challenges of Nano Devices, Sensors, and MEMS

Outlook and Challenges of Nano Devices, Sensors, and MEMS
Author: Ting Li
Publisher: Springer
Total Pages: 521
Release: 2017-02-22
Genre: Technology & Engineering
ISBN: 3319508245
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This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrical and/or optical performance, how to find optimal solutions to achieve the best outcome, how these apparatus can be designed via models and simulations, how to improve reliability, and what are the possible challenges and roadblocks moving forward.

Triboelectric Nanogenerators

Triboelectric Nanogenerators
Author: Zhong Lin Wang
Publisher: Springer
Total Pages: 517
Release: 2016-08-17
Genre: Technology & Engineering
ISBN: 3319400398
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This book introduces an innovative and high-efficiency technology for mechanical energy harvesting. The book covers the history and development of triboelectric nanogenerators, basic structures, working principles, performance characterization, and potential applications. It is divided into three parts: Part A illustrates the fundamental working modes of triboelectric nanogenerators with their prototype structures and theoretical analysis; Part B and Part C introduce two categories of applications, namely self-powered systems and self-powered active sensors. The book will be an ideal guide to scientists and engineers beginning to study triboelectric nanogenerators or wishing to deepen their knowledge of the field. Readers will be able to place the technical details about this technology in context, and acquire the necessary skills to reproduce the experimental setups for fabrication and measurement.

Advanced Piezoelectric Materials

Advanced Piezoelectric Materials
Author: Kenji Uchino
Publisher: Woodhead Publishing
Total Pages: 848
Release: 2017-06-20
Genre: Technology & Engineering
ISBN: 0081012551
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Advanced Piezoelectric Materials: Science and Technology, Second Edition, provides revised, expanded, and updated content suitable for those researching piezoelectric materials or using them to develop new devices in areas such as microelectronics, optical, sound, structural, and biomedical engineering. Three new chapters cover multilayer technologies with base-metal internal electrodes, templated grain growth preparation techniques for manufacturing piezoelectric single crystals, and piezoelectric MEMS technologies. Chapters from the first edition have been revised in order to provide up-to-date, comprehensive coverage of developments in the field. Part One covers the structure and properties of a range of piezoelectric materials. Part Two details advanced manufacturing processes for particular materials and device types, including three new chapters. Finally, Part Three covers materials development for three key applications of piezoelectric materials. Dr. Kenji Uchino is a pioneer in piezoelectric actuators, Professor of Electrical Engineering at Penn State University, and Director of the International Center for Actuators and Transducers. He has authored 550 papers, 54 books and 26 patents in the ceramic actuator area. Features an overview of manufacturing methods for a wide range of piezoelectric materials Provides revised, expanded, and updated coverage compared to the first edition, including three new chapters Suitable for those researching piezoelectric materials or using them to develop new devices in areas such as microelectronics, optical, sound, structural, and biomedical engineering

MEMS Materials and Processes Handbook

MEMS Materials and Processes Handbook
Author: Reza Ghodssi
Publisher: Springer Science & Business Media
Total Pages: 1211
Release: 2011-03-18
Genre: Technology & Engineering
ISBN: 0387473181
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MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.