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Polycrystalline Silicon for Integrated Circuits and Displays

Polycrystalline Silicon for Integrated Circuits and Displays
Author: Ted Kamins
Publisher: Springer Science & Business Media
Total Pages: 391
Release: 2012-12-06
Genre: Technology & Engineering
ISBN: 1461555779

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Polycrystalline Silicon for Integrated Circuits and Displays, Second Edition presents much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon. By properly understanding the properties of polycrystalline silicon and their relation to the deposition conditions, polysilicon can be designed to ensure optimum device and integrated-circuit performance. Polycrystalline silicon has played an important role in integrated-circuit technology for two decades. It was first used in self-aligned, silicon-gate, MOS ICs to reduce capacitance and improve circuit speed. In addition to this dominant use, polysilicon is now also included in virtually all modern bipolar ICs, where it improves the basic physics of device operation. The compatibility of polycrystalline silicon with subsequent high-temperature processing allows its efficient integration into advanced IC processes. This compatibility also permits polysilicon to be used early in the fabrication process for trench isolation and dynamic random-access-memory (DRAM) storage capacitors. In addition to its integrated-circuit applications, polysilicon is becoming vital as the active layer in the channel of thin-film transistors in place of amorphous silicon. When polysilicon thin-film transistors are used in advanced active-matrix displays, the peripheral circuitry can be integrated into the same substrate as the pixel transistors. Recently, polysilicon has been used in the emerging field of microelectromechanical systems (MEMS), especially for microsensors and microactuators. In these devices, the mechanical properties, especially the stress in the polysilicon film, are critical to successful device fabrication. Polycrystalline Silicon for Integrated Circuits and Displays, Second Edition is an invaluable reference for professionals and technicians working with polycrystalline silicon in the integrated circuit and display industries.


Polycrystalline Silicon for Integrated Circuit Applications

Polycrystalline Silicon for Integrated Circuit Applications
Author: Ted Kamins
Publisher: Springer Science & Business Media
Total Pages: 302
Release: 2012-12-06
Genre: Technology & Engineering
ISBN: 1461316812

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Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa tion has been published about polysilicon. A wide range of deposition conditions has been used to form films exhibiting markedly different properties. Seemingly contradictory results can often be explained by considering the details of the structure formed. This monograph is an attempt to synthesize much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon so that it can be used most effectively to enhance device and integrated-circuit perfor mance. As device performance improves, however, some of the proper ties of polysilicon are beginning to restrict the overall performance of integrated circuits, and the basic limitations of the properties of polysili con also need to be better understood to minimize potential degradation of circuit behavior.


Thin Film Transistors: Polycrystalline silicon thin film transistors

Thin Film Transistors: Polycrystalline silicon thin film transistors
Author: Yue Kuo
Publisher: Springer Science & Business Media
Total Pages: 528
Release: 2004
Genre: Thin film transistors
ISBN: 9781402075063

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This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.


Introduction to Thin Film Transistors

Introduction to Thin Film Transistors
Author: S.D. Brotherton
Publisher: Springer Science & Business Media
Total Pages: 467
Release: 2013-04-16
Genre: Technology & Engineering
ISBN: 3319000020

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Introduction to Thin Film Transistors reviews the operation, application and technology of the main classes of thin film transistor (TFT) of current interest for large area electronics. The TFT materials covered include hydrogenated amorphous silicon (a-Si:H), poly-crystalline silicon (poly-Si), transparent amorphous oxide semiconductors (AOS), and organic semiconductors. The large scale manufacturing of a-Si:H TFTs forms the basis of the active matrix flat panel display industry. Poly-Si TFTs facilitate the integration of electronic circuits into portable active matrix liquid crystal displays, and are increasingly used in active matrix organic light emitting diode (AMOLED) displays for smart phones. The recently developed AOS TFTs are seen as an alternative option to poly-Si and a-Si:H for AMOLED TV and large AMLCD TV applications, respectively. The organic TFTs are regarded as a cost effective route into flexible electronics. As well as treating the highly divergent preparation and properties of these materials, the physics of the devices fabricated from them is also covered, with emphasis on performance features such as carrier mobility limitations, leakage currents and instability mechanisms. The thin film transistors implemented with these materials are the conventional, insulated gate field effect transistors, and a further chapter describes a new thin film transistor structure: the source gated transistor, SGT. The driving force behind much of the development of TFTs has been their application to AMLCDs, and there is a chapter dealing with the operation of these displays, as well as of AMOLED and electrophoretic displays. A discussion of TFT and pixel layout issues is also included. For students and new-comers to the field, introductory chapters deal with basic semiconductor surface physics, and with classical MOSFET operation. These topics are handled analytically, so that the underlying device physics is clearly revealed. These treatments are then used as a reference point, from which the impact of additional band-gap states on TFT behaviour can be readily appreciated. This reference book, covering all the major TFT technologies, will be of interest to a wide range of scientists and engineers in the large area electronics industry. It will also be a broad introduction for research students and other scientists entering the field, as well as providing an accessible and comprehensive overview for undergraduate and postgraduate teaching programmes.


Thin Film Transistor Circuits and Systems

Thin Film Transistor Circuits and Systems
Author: Reza Chaji
Publisher: Cambridge University Press
Total Pages: 181
Release: 2013-08-29
Genre: Technology & Engineering
ISBN: 110706726X

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Providing a reliable and consolidated treatment of the principles behind large-area electronics, this book provides a comprehensive review of the design challenges associated with building circuits and systems from thin-film transistors. The authors describe the architecture, fabrication and design considerations for the principal types of TFT and their numerous applications. The practicalities of device non-ideality are also addressed and the specific design considerations necessitated by instabilities and non-uniformities in existing fabrication technologies. Containing device-circuit information, discussion of electronic solutions that compensate for material deficiencies, and design methodologies applicable to a wide variety of organic and inorganic disordered materials, this is an essential reference for all researchers, circuit and device engineers working on large-area electronics.


Thin Film Transistor Circuits and Systems

Thin Film Transistor Circuits and Systems
Author: Reza Chaji
Publisher: Cambridge University Press
Total Pages: 181
Release: 2013-08-29
Genre: Technology & Engineering
ISBN: 1107012333

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A comprehensive review of the design challenges associated with building thin-film transistor circuits and systems and how to overcome them.


Thin Film Transistor Technologies (TFTT VII)

Thin Film Transistor Technologies (TFTT VII)
Author: Yue Kuo
Publisher: The Electrochemical Society
Total Pages: 340
Release: 2005
Genre: Technology & Engineering
ISBN: 9781566774581

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