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Plasma Source Ion Implantation Research and Applications at Los Alamos National Laboratory

Plasma Source Ion Implantation Research and Applications at Los Alamos National Laboratory
Author:
Publisher:
Total Pages: 5
Release: 1996
Genre:
ISBN:

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Plasma Source Ion Implantation research at Los Alamos Laboratory includes direct investigation of the plasma and materials science involved in target surface modification, numerical simulations of the implantation process, and supporting hardware engineering. Target materials of Al, Cr, Cu-Zn, Mg, Ni, Si, Ti, W, and various Fe alloys have been processed using plasmas produced from Ar, NH3, N2, CH4, and C2H2 gases. Individual targets with surface areas as large as (approximately)4 m2, or weighing up to 1200 kg, have been treated in the large LANL facility. In collaboration with General Motors and the University of Wisconsin, a process has been developed for application of hard, low friction, diamond-like-carbon layers on assemblies of automotive pistons. Numerical simulations have been performed using a 21/2-D particle- in-cell code, which yields time-dependent implantation energy, dose, and angle of arrival for ions at the target surface for realistic geometries. Plasma source development activities include the investigation of pulsed, inductively coupled sources capable of generating highly dissociated N with ion densities n{sub i} (approximately) 1011/cm3, at (approximately)100 W average input power. Cathodic arc sources have also been used to produce filtered metallic and C plasmas for implantation and deposition either in vacuum, or in conjunction with a background gas for production of highly adherent ceramic coatings.


A Commercial Plasma Source Ion Implantation Facility

A Commercial Plasma Source Ion Implantation Facility
Author:
Publisher:
Total Pages: 10
Release: 1996
Genre:
ISBN:

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Empire Hard Chrome has recently installed commercial plasma source ion implantation (PSU) equipment built by North Star Research Corporation. Los Alamos National Laboratory has assisted in this commercialization effort via two Cooperative Research and Development Agreements to develop the plasma source for the equipment and to identify low-risk commercial PSII applications. The PSII system consists of a 1 m x 1 m cylindrical vacuum chamber with a rf plasma source. The pulse modulator is capable of delivering pulses kV and peak currents of 300 A at maximum repetition rate of 400 Hz. thyratron tube to switch a pulse forming network which is tailored to match the dynamic PSII load. In this paper we discuss the PSII system, process facility, and early commercial applications to production tooling.


Ion Implantation Technology - 94

Ion Implantation Technology - 94
Author: S. Coffa
Publisher: Newnes
Total Pages: 1031
Release: 1995-05-16
Genre: Science
ISBN: 044459972X

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The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters. The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.


Plasma and Ion Beam Processing at Los Alamos

Plasma and Ion Beam Processing at Los Alamos
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Total Pages: 4
Release: 1994
Genre:
ISBN:

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Efforts are underway at Los Alamos National Laboratory to utilize plasma and intense ion beam science and technology of the processing of advanced materials. A major theme involves surface modification of materials, e.g., etching, deposition, alloying, and implantation. In this paper, we concentrate on two programs, plasma source ion implantation and high-intensity pulsed ion beam deposition.


Ion Beam and Plasma Technology Development for Surface Modification at Los Alamos National Laboratory

Ion Beam and Plasma Technology Development for Surface Modification at Los Alamos National Laboratory
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Total Pages:
Release: 2006
Genre:
ISBN:

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We are developing two high-throughput technologies for materials modification. The first is a repetitive intense ion beam source for materials modification through rapid surface melt and resolidification (up to 10[sup 10] deg/sec cooling rates) and for ablative deposition of coatings. The short range of the ions (typically 0.1 to 5 micrometers) allows vaporization or melting at moderate beam energy density (typically 1-50 J/cm[sup 2]). A new repetitive intense ion beam accelerator called CHAMP is under development at Los Alamos. The design beam parameters are: E=200 keV, I=15 kA, [tau]=1 [micro]s, and 1 Hz. This accelerator will enable applications such as film deposition, alloying and mixing, cleaning and polishing, corrosion and wear resistance, polymer surface treatments, and nanophase powder synthesis. The second technology is plasma source ion implantation (PSII) using plasmas generated from both gas phase (using radio frequency excitation) and solid phase (using a cathodic arc) sources. We have used PSII to directly implant ions for surface modification or as method for generating graded interfaces to enhance the adhesion of surface coatings. Surfaces with areas of up to 16 m[sup 2] and weighing more than a thousand kilograms have been treated in the Los Alamos PSII chamber. In addition, PSII in combination with cathodic source deposition has been used to form highly adherent, thick Er[sub 2]O[sub 3] coatings on steel for reactive metal containment in casting. These coatings resist delamination under extreme mechanical and thermal stress.


Plasma Source Ion Implantation Research Laboratory, University of Wisconsin

Plasma Source Ion Implantation Research Laboratory, University of Wisconsin
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Features the Plasma Source Ion Implantation (PSII) Research Laboratory, part of the Department of Nuclear Engineering and Engineering Physics at the University of Wisconsin at Madison. Posts contact information via mailing address and telephone and fax numbers. Contains information on ion implantation and the Laboratory facilities. Lists PSII publications and faculty members.


Energy Research Abstracts

Energy Research Abstracts
Author:
Publisher:
Total Pages: 1032
Release: 1994
Genre: Power resources
ISBN:

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Semiannual, with semiannual and annual indexes. References to all scientific and technical literature coming from DOE, its laboratories, energy centers, and contractors. Includes all works deriving from DOE, other related government-sponsored information, and foreign nonnuclear information. Arranged under 39 categories, e.g., Biomedical sciences, basic studies; Biomedical sciences, applied studies; Health and safety; and Fusion energy. Entry gives bibliographical information and abstract. Corporate, author, subject, report number indexes.


Scientific and Technical Aerospace Reports

Scientific and Technical Aerospace Reports
Author:
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Total Pages: 700
Release: 1995
Genre: Aeronautics
ISBN:

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Lists citations with abstracts for aerospace related reports obtained from world wide sources and announces documents that have recently been entered into the NASA Scientific and Technical Information Database.