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Index of Conference Proceedings

Index of Conference Proceedings
Author: British Library. Document Supply Centre
Publisher:
Total Pages: 870
Release: 2003
Genre: Conference proceedings
ISBN:

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Physics meets industry

Physics meets industry
Author:
Publisher: expert verlag
Total Pages: 146
Release: 2007
Genre:
ISBN: 9783816927402

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MEMS and MOEMS Technology and Applications

MEMS and MOEMS Technology and Applications
Author: P. Rai-Choudhury
Publisher: SPIE Press
Total Pages: 544
Release: 2000
Genre: Technology & Engineering
ISBN: 9780819437167

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The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.