Microfabricated Systems and MEMS V
Author | : |
Publisher | : The Electrochemical Society |
Total Pages | : 278 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9781566772860 |
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Author | : |
Publisher | : The Electrochemical Society |
Total Pages | : 278 |
Release | : 2000 |
Genre | : Technology & Engineering |
ISBN | : 9781566772860 |
Author | : |
Publisher | : |
Total Pages | : 274 |
Release | : 2000 |
Genre | : Microelectronics |
ISBN | : |
Author | : |
Publisher | : The Electrochemical Society |
Total Pages | : 352 |
Release | : 2004 |
Genre | : Microelectromechanical systems |
ISBN | : 9781566774222 |
Author | : Mohamed Gad-el-Hak |
Publisher | : CRC Press |
Total Pages | : 678 |
Release | : 2005-11-29 |
Genre | : Technology & Engineering |
ISBN | : 1420036564 |
Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.
Author | : Peter J. Hesketh |
Publisher | : The Electrochemical Society |
Total Pages | : 268 |
Release | : 2002 |
Genre | : Microelectromechanical systems |
ISBN | : 9781566773720 |
Author | : Jeffrey Lang |
Publisher | : Springer Science & Business Media |
Total Pages | : 469 |
Release | : 2009-09-18 |
Genre | : Technology & Engineering |
ISBN | : 0387777474 |
The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.
Author | : Prem Pal |
Publisher | : CRC Press |
Total Pages | : 425 |
Release | : 2017-04-07 |
Genre | : Science |
ISBN | : 9814613738 |
Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
Author | : Cornelius T. Leondes |
Publisher | : Springer Science & Business Media |
Total Pages | : 2142 |
Release | : 2007-10-08 |
Genre | : Technology & Engineering |
ISBN | : 0387257861 |
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author | : Andreas Manz |
Publisher | : Springer Science & Business Media |
Total Pages | : 269 |
Release | : 2003-09-05 |
Genre | : Science |
ISBN | : 3540695443 |
"WHAT DOES NOT NEED TO BE BIG, WILL BE SMALL", a word by an engineer at a recent conference on chips technology. This sentence is particularly true for chemistry. Microfabrication technology emerged from microelectronics into areas like mechanics and now chemistry and biology. The engineering of micron and submicron sized features on the surface of silicon, glass and polymers opens a whole new world. Micromotors smaller than human hair have been fabricated and they work fine. It is the declared goal of the authors to bring these different worlds together in this volume. Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.
Author | : Marc J. Madou |
Publisher | : CRC Press |
Total Pages | : 672 |
Release | : 2011-06-13 |
Genre | : Technology & Engineering |
ISBN | : 1420055194 |
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.