Micro Optical Technologies For Measurement Sensors And Microsystems PDF Download

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Optical Sensors and Microsystems

Optical Sensors and Microsystems
Author: S. Martellucci
Publisher: Springer Science & Business Media
Total Pages: 312
Release: 2007-05-08
Genre: Science
ISBN: 0306470993

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Proceedings of the 22nd Course of the International School of Quantum Electronics, held 27 November-2 December 1997, in Erice, Italy. In recent years, fiber optical sensors and optical microsystems have assumed a significant role in sensing and measurement of many kinds. These optical techniques are utilised in a wide range of fields, including biomedicine, environmental sensing, mechanical and industrial measurement, and art preservation. This volume, an up-to-date survey of optical sensors and optical microsystems, aims at combining a tutorial foundation with analysis of current research in this area, and an extensive coverage of both technology and applications.


Sensors and Microsystems

Sensors and Microsystems
Author: C. Di Natale
Publisher: World Scientific
Total Pages: 618
Release: 2004
Genre: Technology & Engineering
ISBN: 9789812702944

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This book constitutes a selection of papers presented at the 8th Italian Conference on Sensors and Microsystems. It contains contributions on sensors, microsystems, actuators and related interface electronics. Aspects of chemistry, biology and materials science are also covered. In addition, special sensor applications of industrial interest are presented and discussed. The proceedings have been selected for coverage in: . OCo Materials Science Citation Index-. OCo Index to Scientific & Technical Proceedings- (ISTP- / ISI Proceedings). OCo Index to Scientific & Technical Proceedings (ISTP CDROM version / ISI Proceedings). OCo CC Proceedings OCo Engineering & Physical Sciences."


Diffractive Optics and Optical Microsystems

Diffractive Optics and Optical Microsystems
Author: S. Martellucci
Publisher: Springer Science & Business Media
Total Pages: 406
Release: 2013-06-29
Genre: Science
ISBN: 1489914749

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Proceedings of the 20th Course of the International School of Quantum Electronics held in Erice, Italy, November 14-24, 1996


Optical Nano- and Microsystems for Bioanalytics

Optical Nano- and Microsystems for Bioanalytics
Author: Wolfgang Fritzsche
Publisher: Springer Science & Business Media
Total Pages: 332
Release: 2012-02-03
Genre: Science
ISBN: 3642254985

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This book describes the state of the art in the field of bioanalytical nano- and microsystems with optical functionality. In 12 chapters distinguished scientists and leaders in their respective fields show how various optical technologies have been miniaturized and integrated over the last few decades in order to be combined with nano- and microsystems for applications in the life sciences. The main detection and characterization technologies are introduced, and examples of the superiority of these integrated approaches compared to traditional ones are provided. Examples from e.g. the fields of optical waveguides, integrated interferometers, surface plasmon resonance or Raman spectroscopy are introduced and discussed, and it is shown how these approaches have led to novel functionalities and thereby novel applications.


MEMS and MOEMS Technology and Applications

MEMS and MOEMS Technology and Applications
Author: P. Rai-Choudhury
Publisher: SPIE Press
Total Pages: 544
Release: 2000
Genre: Technology & Engineering
ISBN: 9780819437167

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The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.


Optical Inspection of Microsystems

Optical Inspection of Microsystems
Author: Wolfgang Osten
Publisher: CRC Press
Total Pages: 524
Release: 2018-10-03
Genre: Science
ISBN: 1420019163

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Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.


LIGA and its Applications

LIGA and its Applications
Author: Volker Saile
Publisher: John Wiley & Sons
Total Pages: 491
Release: 2009-01-07
Genre: Technology & Engineering
ISBN: 3527316981

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Covering technological aspects as well as the suitability and applicability of various kinds of uses, this handbook shows optimization strategies, techniques and assembly pathways to achieve the combination of complex, even three-dimensional structures with simple manufacturing steps. The authors provide information on markets, commercialization opportunities and aspects of mass or large-scale production as well as design tools, experimental techniques, novel materials, and ideas for future improvements. Not only do they weigh up cost versus quantity, they also consider CMOS and LIGA strategies. Of interest to physicists, electronics engineers, materials scientists, institutional and industrial libraries as well as graduate students of the relevant disciplines.