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Metrology and Diagnostic Techniques for Nanoelectronics

Metrology and Diagnostic Techniques for Nanoelectronics
Author: Zhiyong Ma
Publisher: CRC Press
Total Pages: 1454
Release: 2017-03-27
Genre: Science
ISBN: 1351733958
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Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.

Electrical Atomic Force Microscopy for Nanoelectronics

Electrical Atomic Force Microscopy for Nanoelectronics
Author: Umberto Celano
Publisher: Springer
Total Pages: 408
Release: 2019-08-01
Genre: Science
ISBN: 3030156125
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The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.

Measurement Techniques for Radio Frequency Nanoelectronics

Measurement Techniques for Radio Frequency Nanoelectronics
Author: T. Mitch Wallis
Publisher: Cambridge University Press
Total Pages: 329
Release: 2017-09-14
Genre: Technology & Engineering
ISBN: 1108326315
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Connect basic theory with real-world applications with this practical, cross-disciplinary guide to radio frequency measurement of nanoscale devices and materials. • Learn the techniques needed for characterizing the performance of devices and their constituent building blocks, including semiconducting nanowires, graphene, and other two dimensional materials such as transition metal dichalcogenides • Gain practical insights into instrumentation, including on-wafer measurement platforms and scanning microwave microscopy • Discover how measurement techniques can be applied to solve real-world problems, in areas such as passive and active nanoelectronic devices, semiconductor dopant profiling, subsurface nanoscale tomography, nanoscale magnetic device engineering, and broadband, spatially localized measurements of biological materials Featuring numerous practical examples, and written in a concise yet rigorous style, this is the ideal resource for researchers, practicing engineers, and graduate students new to the field of radio frequency nanoelectronics.

Frontiers of Characterization and Metrology for Nanoelectronics

Frontiers of Characterization and Metrology for Nanoelectronics
Author: David G. Seiler
Publisher: American Institute of Physics
Total Pages: 0
Release: 2009-10-26
Genre: Technology & Engineering
ISBN: 9780735407121
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As the semiconductor industry continues to move toward silicon nanoelectronics and beyond, the introduction of new materials, innovative processing and assembly, and novel devices brings formidable metrology challenges. We have entered an era where nanotechnology is required to meet the demand for smaller, faster, cheaper, and more complex functional chips. Innovative metrology and characterization methods have become critical. This book emphasizes the frontiers of innovation in the characterization and metrology needed to advance nanoelectronics. It comprises applications in nanoelectronic materials and devices, research and development, and manufacturing and diagnostics. Novel characterization methods for beyond CMOS and extreme CMOS devices are addressed, as well as electrical measurements, interconnects, patterning, microscopy, and modeling. The Editors believe that this book of collected papers from world-class leaders provides a basis and effective portrayal of the industry’s characterization and metrology needs and how they are being addressed by industry, academia, and government to continue the dramatic progress in semiconductors into the nanoelectronic regime. It also provides a foundation for stimulating further advances in metrology and new ideas for research and development.

Surfactants in Precision Cleaning

Surfactants in Precision Cleaning
Author: Rajiv Kohli
Publisher: Elsevier
Total Pages: 336
Release: 2021-10-21
Genre: Technology & Engineering
ISBN: 0128222174
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Surfactants in Precision Cleaning: Removal of Contaminants at the Micro and Nanoscale is a single source of information on surfactants, emulsions, microemulsions and detergents for removal of surface contaminants at the micro and nanoscale. The topics covered include cleaning mechanisms, effect of surfactants, types of stable dispersions (emulsions, microemulsions, surfactants, detergents, etc.), cleaning technology, and cleaning applications. Users will find this volume an excellent resource on the use of stable dispersions in precision cleaning. Single source of current information on surfactants, emulsions, microemulsions and detergents for precision cleaning applications Includes a list of extensive reference sources Discusses specific selection and properties of surfactants and their use in cleaning Provides a guide for cleaning applications in different industry sectors

Nanoscale Calibration Standards and Methods

Nanoscale Calibration Standards and Methods
Author: Günter Wilkening
Publisher: John Wiley & Sons
Total Pages: 541
Release: 2006-05-12
Genre: Technology & Engineering
ISBN: 3527606874
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The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing

Microscale Diagnostic Techniques

Microscale Diagnostic Techniques
Author: Kenneth S. Breuer
Publisher: Springer Science & Business Media
Total Pages: 280
Release: 2005-03-17
Genre: Medical
ISBN: 9783540230991
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Microrheology.- Micron-Resolution Particle Image Velocimetry.- Electrokinetic Flow Diagnostics.- Micro- and Nano-Scale Diagnostic Technique for Thermomentry.- Nanoscale Mechanical Characterization of Carbon Nanotubes.- Applications of the Piezoelectric Quartz Crystal Microbalance for Microdevice Development.

Fundamental Principles of Engineering Nanometrology

Fundamental Principles of Engineering Nanometrology
Author: Richard Leach
Publisher: William Andrew
Total Pages: 349
Release: 2009-09-03
Genre: Technology & Engineering
ISBN: 1437778321
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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7

Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7
Author: Dieter K. Schroder
Publisher: The Electrochemical Society
Total Pages: 406
Release: 2007
Genre: Semiconductors
ISBN: 1566775698
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Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.

Metrology and Physical Mechanisms in New Generation Ionic Devices

Metrology and Physical Mechanisms in New Generation Ionic Devices
Author: Umberto Celano
Publisher: Springer
Total Pages: 191
Release: 2016-06-18
Genre: Science
ISBN: 3319395319
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This thesis presents the first direct observations of the 3D-shape, size and electrical properties of nanoscale filaments, made possible by a new Scanning Probe Microscopy-based tomography technique referred to as scalpel SPM. Using this innovative technology and nm-scale observations, the author achieves essential insights into the filament formation mechanisms, improves the understanding required for device optimization, and experimentally observes phenomena that had previously been only theoretically proposed.