Mechanisms Of Chemical Mechanical Planarization Of Copper Tantalum Thin Films Using Fumed Silica Abrasives PDF Download
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Author | : Ying Li |
Publisher | : |
Total Pages | : 374 |
Release | : 2001 |
Genre | : Copper |
ISBN | : |
Download Mechanisms of Chemical-mechanical Planarization of Copper/tantalum Thin Films Using Fumed Silica Abrasives Book in PDF, ePub and Kindle
Author | : Mariappan Hariharaputhiran |
Publisher | : |
Total Pages | : 316 |
Release | : 2000 |
Genre | : Copper |
ISBN | : |
Download Mechanism of Dissolution and Planarization of Copper/tantalum Films During Chemical-mechanical Polishing Book in PDF, ePub and Kindle
Author | : Sudipta Seal |
Publisher | : The Electrochemical Society |
Total Pages | : 370 |
Release | : 2003 |
Genre | : Technology & Engineering |
ISBN | : 9781566774048 |
Download Chemical Mechanical Planarization VI Book in PDF, ePub and Kindle
Author | : Rajesh Badri |
Publisher | : |
Total Pages | : 72 |
Release | : 2003 |
Genre | : Copper |
ISBN | : |
Download A Study of Chemical Mechanical Polishing (CMP) of the Sputter Deposited Copper and Tantalum Thin Films Book in PDF, ePub and Kindle
Author | : Babu Suryadevara |
Publisher | : Woodhead Publishing |
Total Pages | : 650 |
Release | : 2021-09-10 |
Genre | : Technology & Engineering |
ISBN | : 0128218193 |
Download Advances in Chemical Mechanical Planarization (CMP) Book in PDF, ePub and Kindle
Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The second edition includes the recent advances of CMP and its emerging materials, methods, and applications, including coverage of post-CMP cleaning challenges and tribology of CMP. This important book offers a systematic review of fundamentals and advances in the area. Part one covers CMP of dielectric and metal films, with chapters focusing on the use of current and emerging techniques and processes and on CMP of various materials, including ultra low-k materials and high-mobility channel materials, and ending with a chapter reviewing the environmental impacts of CMP processes. New content addressed includes CMP challenges with tungsten, cobalt, and ruthenium as interconnect and barrier films, consumables for ultralow topography and CMP for memory devices. Part two addresses consumables and process control for improved CMP and includes chapters on CMP pads, diamond disc pad conditioning, the use of FTIR spectroscopy for characterization of surface processes and approaches for defection characterization, mitigation, and reduction. Advances in Chemical Mechanical Planarization (CMP), Second Edition is an invaluable resource and key reference for materials scientists and engineers in academia and R&D. Reviews the most relevant techniques and processes for CMP of dielectric and metal films Includes chapters devoted to CMP for current and emerging materials Addresses consumables and process control for improved CMP, including post-CMP
Author | : |
Publisher | : |
Total Pages | : 816 |
Release | : 2000 |
Genre | : Dissertation abstracts |
ISBN | : |
Download American Doctoral Dissertations Book in PDF, ePub and Kindle
Author | : Sathish Babu Satya Veera Janjam |
Publisher | : |
Total Pages | : 176 |
Release | : 2006 |
Genre | : Chemical mechanical planarization |
ISBN | : |
Download Preparation and Evaluation of Mixed Abrasive Slurries for Chemical Mechanical Planarization of Copper and Tantalum Book in PDF, ePub and Kindle
Author | : Suresh Kumar Govindaswamy |
Publisher | : |
Total Pages | : 416 |
Release | : 2006 |
Genre | : Chemical mechanical planarization |
ISBN | : |
Download Chemical Mechanical Planarization of Copper Thin Films Book in PDF, ePub and Kindle
Author | : Atanu Roy Chowdhury |
Publisher | : |
Total Pages | : 122 |
Release | : 2004 |
Genre | : Aluminum oxide |
ISBN | : |
Download Investigation of Novel Abrasive Particles for Copper Chemical Mechanical Planarization (CMP) Book in PDF, ePub and Kindle
Author | : |
Publisher | : |
Total Pages | : 734 |
Release | : 2002 |
Genre | : Dissertations, Academic |
ISBN | : |
Download Dissertation Abstracts International Book in PDF, ePub and Kindle