Layered Surface Acoustic Wave Devices For Film Characterization And Sensor Applications PDF Download

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Simulation and Characterization of Multi-layered Surface Acoustic Wave Devices for Filtering and Sensing Applications

Simulation and Characterization of Multi-layered Surface Acoustic Wave Devices for Filtering and Sensing Applications
Author: Hugo Chambon
Publisher:
Total Pages: 0
Release: 2019
Genre:
ISBN:

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This thesis deals with the design and characterization of multilayer acoustic wave micro-devices. The fifth generation of communication (5G) requires more efficient acoustic resonators (frequencies > 3GHz, wider bandwidth). In this context, we have designed and optimized using FEM simulation, the geometry of Lamb wave resonator based on AlScN. The final device, consisting of a layer composed of 30% Sc and deposited on a Bragg W/SiO2 mirror, shows excellent performance (coupling coefficient of 5% and quality factor of 768) as well as a good agreement with the simulation. To characterize the surface of BAW and SAW over the 5G frequency range, we also designed and developed a heterodyne interferometer. The latter has been used successfully to characterize surface vibrations with amplitudes between 1 and 10 pm at 5.95 GHz. Furthermore, thanks to their robustness and ability to be wirelessly interrogated,SAW sensors are used in harsh environments and are of great interest for medical applications and structural health monitoring. Recently, the introduction of multi-material stacks offers new development opportunities. We thus studied a pressure sensor composed of two complementary layers, as well as a so-called package- less sensor using different acoustic impedance layers. To design these new sensors, we have developed a simulation tool based on the extraction of mode coupling parameters and taking into account the effects of temperature, stresses and strains to estimate their sensitivity.


Advances in Surface Acoustic Wave Technology, Systems and Applications

Advances in Surface Acoustic Wave Technology, Systems and Applications
Author: Clemens C. W. Ruppel
Publisher: World Scientific
Total Pages: 374
Release: 2001
Genre: Technology & Engineering
ISBN: 9810245386

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Surface acoustic wave (SAW) devices are recognized for their versatility and efficiency in controlling and processing electrical signals. This has resulted in a multitude of device concepts for a wide range of signal processing functions, such as delay lines, filters, resonators, pulse compressors, convolvers, and many more. As SAW technology has found its way into mass market products such as TV receivers, pagers, keyless entry systems and cellular phones, the production volume has risen to millions of devices produced every day. At the other end of the scale, there are specialized high performance signal processing SAW devices for satellite communication and military applications, such as radar and electronic warfare. This volume, together with Volume 2, presents an overview of recent advances in SAW technology, systems and applications by some of the foremost researchers in this exciting field.


Surface Acoustic Wave Devices and Their Signal Processing Applications

Surface Acoustic Wave Devices and Their Signal Processing Applications
Author: Colin Campbell
Publisher: Elsevier
Total Pages: 485
Release: 2012-12-02
Genre: Technology & Engineering
ISBN: 0323148662

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Surface Acoustic Wave Devices and Their Signal Processing Applications is a textbook that combines experiment and theory in assessing the signal processing applications of surface acoustic wave (SAW) devices. The operating principles of SAW devices are described from a circuit design viewpoint. This book is comprised of 18 chapters and begins with a historical background on surface acoustic waves and a discussion on the merits of SAW devices as well as their applications. The next chapter introduces the reader to the basics of acoustic waves and piezoelectricity, together with the effect of acoustic bulk waves on the performance of SAW filters. The principles of linear phase SAW filter design and equivalent circuit models for a SAW filter are then described. The remaining chapters focus on trade-offs in linear phase SAW filter design; compensation for second-order effects; harmonic SAW delay lines for gigahertz frequencies; and coding techniques using linear SAW transducers. The final chapter highlights Some other significant alternative design techniques and applications for SAW devices. This monograph will be suitable for engineering or physics students as well as engineers, scientists, and technical staff in industry who seek further information on SAW-based circuits, systems, and applications.


Surface Acoustic Wave Devices in Telecommunications

Surface Acoustic Wave Devices in Telecommunications
Author: Ken-Ya Hashimoto
Publisher: Springer Science & Business Media
Total Pages: 352
Release: 2000-06-21
Genre: Technology & Engineering
ISBN: 9783540672326

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Surface acoustic wave (SAW) devices are widely used in mobile communications, a rapidly evolving market. This book gives an overview on the latest SAW technologies with an emphasis on the design and simulation of devices, such as resonator-based devices employing the SH-type leaky SAW.


Advances In Surface Acoustic Wave Technology, Systems & Applications, Vol 2

Advances In Surface Acoustic Wave Technology, Systems & Applications, Vol 2
Author: Tor A Fjeldly
Publisher: World Scientific
Total Pages: 374
Release: 2001-01-31
Genre: Technology & Engineering
ISBN: 9814491608

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Surface acoustic wave (SAW) devices are recognized for their versatility and efficiency in controlling and processing electrical signals. This has resulted in a multitude of device concepts for a wide range of signal processing functions, such as delay lines, filters, resonators, pulse compressors, convolvers, and many more. As SAW technology has found its way into mass market products such as TV receivers, pagers, keyless entry systems and cellular phones, the production volume has risen to millions of devices produced every day. At the other end of the scale, these are specialized high performance signal processing SAW devices for satellite communication and military applications, such as radar and electronic warfare.This volume, together with Volume 1, presents an overview of recent advances in SAW technology, systems and applications by some of the foremost researchers in this exciting field.


Acoustic Wave Sensors

Acoustic Wave Sensors
Author: D. S. Ballantine Jr.
Publisher: Elsevier
Total Pages: 451
Release: 1996-10-21
Genre: Science
ISBN: 0080523331

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Written by an interdisciplinary group of experts from both industry and academia, Acoustic Wave Sensors provides an in-depth look at the current state of acoustic wave devices and the scope of their use in chemical, biochemical, and physical measurements, as well as in engineering applications. Because of the inherent interdisciplinary applications of these devices, this book will be useful for the chemist and biochemist interested in the use and development ofthese sensors for specific applications; the electrical engineer involved in the design and improvement of these devices; the chemical engineer and the biotechnologist interested in using these devices for process monitoring and control; and the sensor community at large. Provides in-depth comparison and analyses of different types of acoustic wave devices Discusses operating principles and design considerations Includes table of relevant material constants for quick reference Presents an extensive review of current uses of these devices for chemical, biochemical, and physical measurements, and engineering applications


Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices

Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices
Author: Marco G. Beghi
Publisher: BoD – Books on Demand
Total Pages: 616
Release: 2013-08-28
Genre: Technology & Engineering
ISBN: 9535111892

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Acoustics is a mature field which enjoys a never ending youth. New developments are induced by either the search for a better understanding, or by technological innovations. Micro-fabrication techniques introduced a whole new class of microdevices, which exploit acoustic waves for various tasks, and in particular for information processing and for sensing purposes. Performance improvements are achievable by better modelling tools, able to deal with more complex configurations, and by more refined techniques of fabrication and of integration in technological systems, like wireless communications. Several chapters of this book deal with modelling and fabrication techniques for microdevices, including unconventional phenomena and configurations. But this is far from exhausting the research lines in acoustics. Theoretical analyses and modelling techniques are presented, for phenomena ranging from the detection of cracks to the acoustics of the oceans. Measurement methods are also discussed, which probe by acoustic waves the properties of widely different systems.


Acoustic, Thermal Wave and Optical Characterization of Materials

Acoustic, Thermal Wave and Optical Characterization of Materials
Author: G.M. Crean
Publisher: Elsevier
Total Pages: 413
Release: 2014-08-04
Genre: Technology & Engineering
ISBN: 044459664X

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This volume focuses on a variety of novel non-destructive techniques for the characterization of materials, processes and devices. Emphasis is placed on probe-specimen interactions, in-situ diagnosis, instrumentation developments and future trends. This was the first time a symposium on this topic had been held, making the response particularly gratifying. The high quality of the contributions are a clear indication that non-destructive materials characterization is becoming a dynamic research area in Europe at the present time.A selection of contents: The role of acoustic properties in designs of acoustic and optical fibers (C.K. Jen). Observation of stable crack growth in Al2O3 ceramics using a scanning acoustic microscope (A. Quinten, W. Arnold). Mechanical characterization by acoustic techniques of SIC chemical vapour deposited thin films (J.M. Saurel et al.). Efficient generation of acoustic pressure waves by short laser pulses (S. Fassbender et al.). Use of scanning electron acoustic microscopy for the analysis of III-V compound devices (J.F. Bresse). Waves and vibrations in periodic piezoelectric composite materials (B.A. Auld). Precision ultrasonic velocity measurements for the study of the low temperature acoustic properties in defective materials (A. Vanelstraete, C. Laermans). Thermally induced concentration wave imaging (P. Korpiun et al.). Interferometric measurement of thermal expansion (V. Kurzmann et al.). Quantitative analyses of power loss mechanisms in semiconductor devices by thermal wave calorimetry (B. Büchner et al.). Thermal wave probing of the optical electronic and thermal properties of semiconductors (D. Fournier, A. Boccara). Thermal wave measurements in ion-implanted silicon (G. Queirola et al.). Optical-thermal non-destructive examination of surface coatings (R.E. Imhof et al.). Bonding analysis of layered materials by photothermal radiometry (M. Heuret et al.). Thermal non-linearities of semiconductor-doped glasses in the near-IR region (M. Bertolotti et al.). Theory of picosecond transient reflectance measurement of thermal and eisatic properties of thin metal films (Z. Bozóki et al.). The theory and application of contactless microwave lifetime measurement (T. Otaredian et al.). Ballistic phonon signal for imaging crystal properties (R.P. Huebener et al.). Determination of the elastic constants of a polymeric Langmuir-Blodgett film by Briliouin spectroscopy (F. Nizzoli et al.). Quantum interference effects in the optical second-harmonic response tensor of a metal surface (O. Keller). Study of bulk and surface phonons and plasmons in GaAs/A1As superlattices by far-IR and Raman spectroscopy (T. Dumslow et al.). Far-IR spectroscopy of bulk and surface phonon-polaritons on epitaxial layers of CdTe deposited by plasma MOCVD on GaAs substrates (T. Dumelow et al.). In-situ characterization by reflectance difference spectroscopy of III-V materials and heterojunctions grown by low pressure metal organic chemical vapour deposition (O. Acher et al.). Optical evidence of precipitates in arsenic-implanted silicon (A. Borghesi et al.). Polarized IR reflectivity of CdGeAs2 (L. Artús et al.). Raman and IR spectroscopies: a useful combination to study semiconductor interfaces (D.R.T. Zahn et al.). Silicon implantation of GaAs at low and medium doses: Raman assessment of the dopant activation (S. Zakang et al.). Ellipsometric characterization of thin films and superlattices (J. Bremer et al.). Ellipsometric characterization of multilayer transistor structures (J.A. Woollam et al.). Quality of molecular-beam-epitaxy-grown GaAs on Si(100) studied by ellipsometry (U. Rossow et al.). An ellipsometric and RBS study of TiSi2 formation (J.M.M. de Nijs, A. van Silfhout). A new microscope for semiconductor luminescence studies (P.S. Aplin, J.C. Day). Structural analysis of optical fibre preforms fabricated by the sol-gel process (A.M. Elas et al.). Author index.