Langasite Surface Acoustic Wave Gas Sensors PDF Download

In this study, gas sensing systems that are based on piezoelectric smart material and structures are proposed, designed, developed, and tested, which are mainly aimed to address the temperature dependent CO2 gas sensing in a real environment. The state-of-the-art of gas sensing technologies are firstly reviewed and discussed for their pros and cons. The adsorption mechanisms including physisorption and chemisorption are subsequently investigated to characterize and provide solutions to various gas sensors. Particularly, a QCM based gas sensor and a C-axis inclined zigzag ZnO FBAR gas sensor are designed and analyzed for their performance on room temperature CO2 gas sensing, which fall into the scope of physisorption. In contrast, a Langasite (LGS) surface acoustic wave (SAW) based acetone vapor sensor is designed, developed, and tested, which is based on the chemisorption analysis of the LGS substrate. Moreover, solid state gas sensors are characterized and analyzed for chemisorption-based sensitive sensing thin film development, which can be further applied to piezoelectric-based gas sensors (i.e. Ca doped ZnO LGS SAW gas sensors) for performance enhanced CO2 gas sensing. Additionally, an innovative MEMS micro cantilever beam is proposed based on the LGS nanofabrication, which can be potentially applied for gas sensing, when combined with ZnO nanorods deposition. Principal component analysis (PCA) is employed for cross-sensitivity analysis, by which high temperature gas sensing in a real environment can be achieved. The proposed gas sensing systems are designated to work in a high temperature environment by taking advantage of the high temperature stability of the piezoelectric substrates.