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Author | : S. Coffa |
Publisher | : Newnes |
Total Pages | : 1031 |
Release | : 1995-05-16 |
Genre | : Science |
ISBN | : 044459972X |
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The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters. The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
Author | : S. Coffa |
Publisher | : North-Holland |
Total Pages | : 1012 |
Release | : 1995-01-01 |
Genre | : Technology & Engineering |
ISBN | : 9780444821942 |
Download Ion Implantation Technology-94 Book in PDF, ePub and Kindle
The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
Author | : Salvatore Coffa |
Publisher | : |
Total Pages | : 439 |
Release | : 1995 |
Genre | : Ion implantation |
ISBN | : |
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Author | : D.F. Downey |
Publisher | : Elsevier |
Total Pages | : 716 |
Release | : 2012-12-02 |
Genre | : Technology & Engineering |
ISBN | : 0444599800 |
Download Ion Implantation Technology - 92 Book in PDF, ePub and Kindle
Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wide application of ion implantation, as well as exploitation of newly identified opportunities, will require the development of comprehensive implant models. The 141 papers (including 24 invited papers) in this volume address the most recent developments in this field. New structures and possible approaches are described. The implications for ion implantation technology as well as additional observations of needs and opportunities are discussed. The volume will be of value to all those who are interested in acquiring a more complete understanding of the current developments in ion implantation processes and comprehensive implant models.
Author | : J.F. Ziegler |
Publisher | : Elsevier |
Total Pages | : 649 |
Release | : 2012-12-02 |
Genre | : Science |
ISBN | : 0323144012 |
Download Ion Implantation Science and Technology Book in PDF, ePub and Kindle
Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic ions into solids; damage annealing in silicon; and ion implantation metallurgy. Part 2 covers areas such as ion implementation system concepts; ion sources; underlying principles related to ion optics; and safety and radiation considerations in ion implantation. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.
Author | : James F. Ziegler |
Publisher | : |
Total Pages | : |
Release | : 2004 |
Genre | : |
ISBN | : |
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Author | : M. Meyyappan |
Publisher | : The Electrochemical Society |
Total Pages | : 644 |
Release | : 1995 |
Genre | : Technology & Engineering |
ISBN | : 9781566770965 |
Download Proceedings of the Symposium Om Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing Book in PDF, ePub and Kindle
Author | : Ion Implantation Technology, Incorporated |
Publisher | : |
Total Pages | : 687 |
Release | : 2000-01-01 |
Genre | : |
ISBN | : 9780965420723 |
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Author | : |
Publisher | : |
Total Pages | : 615 |
Release | : 1993 |
Genre | : Ion implantation |
ISBN | : |
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Author | : Ishaq Ahmad |
Publisher | : BoD – Books on Demand |
Total Pages | : 154 |
Release | : 2017-06-14 |
Genre | : Science |
ISBN | : 9535132377 |
Download Ion Implantation Book in PDF, ePub and Kindle
Ion implantation is one of the promising areas of sciences and technologies. It has been observed as a continuously evolving technology. In this book, there is a detailed overview of the recent ion implantation research and innovation along with the existing ion implantation technological issues especially in microelectronics. The book also reviews the basic knowledge of the radiation-induced defects production during the ion implantation in case of a semiconductor structure for fabrication and development of the required perfect microelectronic devices. The improvement of the biocompatibility of biomaterials by ion implantation, which is a hot research topic, has been summarized in the book as well. Moreover, advanced materials characterization techniques are also covered in this book to evaluate the ion implantation impact on the materials.