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Film Bulk Acoustic Resonators of High Quality Factors in Liquid Environments for Biosensing Applications

Film Bulk Acoustic Resonators of High Quality Factors in Liquid Environments for Biosensing Applications
Author: Wencheng Xu
Publisher:
Total Pages: 74
Release: 2011
Genre: Blood
ISBN:

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Micro-electro-mechanical systems (MEMS) film bulk acoustic resonator (FBAR) demonstrates label-free biosensing capabilities and is considered to be a promising alternative of quartz crystal microbalance (QCM). FBARs achieve great success in vacuum, or in the air, but find limited applications in liquid media because squeeze damping significantly degrades quality factor (Q) and results in poor frequency resolution. A transmission-line model shows that by confining the liquid in a thickness comparable to the acoustic wavelength of the resonator, Q can be considerably improved. The devices exhibit damped oscillatory patterns of Q as the liquid thickness varies. Q assumes its maxima and minima when the channel thickness is an odd and even multiple of the quarter-wavelength of the resonance, respectively. Microfluidic channels are integrated with longitudinal-mode FBARs (L-FBARs) to realize this design; a tenfold improvement of Q over fully-immersed devices is experimentally verified. Microfluidic integrated FBAR sensors have been demonstrated for detecting protein binding in liquid and monitoring the Vroman effect (the competitive protein adsorption behavior), showing their potential as a promising bio-analytical tool. A contour-mode FBAR (C-FBAR) is developed to further improve Q and to alleviate the need for complex integration of microfluidic channels. The C-FBAR consists of a suspended piezoelectric ring made of aluminum nitride and is excited in the fundamental radial-extensional mode. By replacing the squeeze damping with shear damping, high Qs (189 in water and 77 in human whole blood) are obtained in semi-infinite depth liquids. The C-FBAR sensors are characterized by aptamer - thrombin binding pairs and aqueous glycerine solutions for mass and viscosity sensing schemes, respectively. The C-FBAR sensor demonstrates accurate viscosity measurement from 1 to 10 centipoise, and can be deployed to monitor in-vitro blood coagulation processes in real time. Results show that its resonant frequency decreases as the viscosity of the blood increases during the fibrin generation process after the coagulation cascade. The coagulation time and the start/end of the fibrin generation are quantitatively determined, showing the C-FBAR can be a low-cost, portable yet reliable tool for hemostasis diagnostics.


Acoustic Wave and Electromechanical Resonators

Acoustic Wave and Electromechanical Resonators
Author: Humberto Campanella
Publisher: Artech House
Total Pages: 364
Release: 2010
Genre: Technology & Engineering
ISBN: 1607839784

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This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.


Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators
Author: Yafei Zhang
Publisher: Springer Science & Business Media
Total Pages: 159
Release: 2012-08-28
Genre: Technology & Engineering
ISBN: 3642317766

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Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.


Design, Modeling and Fabrication of Shear Mode Bulk Acoustic Wave Sensor as a Potential Biosensor

Design, Modeling and Fabrication of Shear Mode Bulk Acoustic Wave Sensor as a Potential Biosensor
Author: Chi-Jung Cheng
Publisher:
Total Pages: 117
Release: 2012
Genre:
ISBN:

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There has been an increasing interest in development of thin film bulk acoustic wave resonator devices for chemical and biological sensing applications in the environmental and biomedical industries. The zinc oxide thin film FBAR devices provide attractive advantages, such as high resonant frequency, small size, and rapid response. Typically, the ZnO-based FBAR devices are operated in the longitudinal wave mode where the ZnO crystallites are perpendicular to the substrate. However, the longitudinal wave mode is adversely affected when used in liquid environments. To overcome this limitation, the shear mode solidly mounted film bulk acoustic wave resonator device is presented in this dissertation.


Tuneable Film Bulk Acoustic Wave Resonators

Tuneable Film Bulk Acoustic Wave Resonators
Author: Spartak Gevorgian
Publisher: Springer Science & Business Media
Total Pages: 255
Release: 2013-02-14
Genre: Technology & Engineering
ISBN: 1447149440

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To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.


Piezoelectric Sensors

Piezoelectric Sensors
Author: Peter Lieberzeit
Publisher: Springer Nature
Total Pages: 344
Release:
Genre:
ISBN: 3031537858

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Materials for Devices

Materials for Devices
Author: Sam Zhang
Publisher: CRC Press
Total Pages: 358
Release: 2022-09-30
Genre: Technology & Engineering
ISBN: 1000646777

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From everyday applications to the rise of automation, devices have become ubiquitous. Specific materials are employed in specific devices because of their particular properties, including electrical, thermal, magnetic, mechanical, ferroelectric, and piezoelectric. Materials for Devices discusses materials selection for optimal application and highlights current materials developments in gas sensors, optical devices, mechanoelectrical devices, and medical and biological devices. Explains how to select the right material for the right device Includes 2D materials, thin films, smart piezoelectric films, and more Presents details on organic solar cells Describes thin films in sensors, actuators, and LEDs Covers thin films and elastic polymers in biomedical devices Discusses growth and characterization of intrinsic magnetic topological insulators This work is aimed at researchers, technologists, and advanced students in materials and electrical engineering and related fields who are interested in developing sensors or devices.


Label-Free Biosensing

Label-Free Biosensing
Author: Michael J. Schöning
Publisher: Springer
Total Pages: 485
Release: 2018-07-20
Genre: Science
ISBN: 3319752200

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This volume summarizes the state-of-the-art technologies, key advances and future trends in the field of label-free biosensing. It provides detailed insights into the different types of solid-state, label-free biosensors, their underlying transducer principles, advanced materials utilized, device-fabrication techniques and various applications. The book offers graduate students, academic researchers, and industry professionals a comprehensive source of information on all facets of label-free biosensing and the future trends in this flourishing field. Highlights of the subjects covered include label-free biosensing with: · semiconductor field-effect devices such as nanomaterial-modified capacitive electrolyte-insulator-semiconductor structures, silicon nanowire transistors, III-nitride semiconductor devices and light-addressable potentiometric sensors · impedimetric biosensors using planar and 3D electrodes · nanocavity and solid-state nanopore devices · carbon nanotube and graphene/graphene oxide biosensors · electrochemical biosensors using molecularly imprinted polymers · biomimetic sensors based on acoustic signal transduction · enzyme logic systems and digital biosensors based on the biocomputing concept · heat-transfer as a novel transducer principle · ultrasensitive surface plasmon resonance biosensors · magnetic biosensors and magnetic imaging devices


Piezoelectric Transducers and Applications

Piezoelectric Transducers and Applications
Author: Antonio Arnau Vives
Publisher: Springer Science & Business Media
Total Pages: 549
Release: 2008-10-10
Genre: Technology & Engineering
ISBN: 3540775080

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This updated guide to the current state-of-the-art of this complex and multidisciplinary area fills an urgent need for a unified source of information on piezoelectric devices and their astounding variety of existing and emerging applications. New understandings underlying the principles of Piezoelectric Transducers, new technological advances in its applications, and new areas of utility for these transducers made a second edition of this book inevitable.