Handbook Of Microlithography Micromachining And Microfabrication PDF Download
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Author | : P. Rai-Choudhury |
Publisher | : IET |
Total Pages | : 716 |
Release | : 1997 |
Genre | : Technology & Engineering |
ISBN | : 9780852969113 |
Download Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication Book in PDF, ePub and Kindle
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Author | : P. Rai-Choudhury |
Publisher | : SPIE Press |
Total Pages | : 780 |
Release | : 1997 |
Genre | : Technology & Engineering |
ISBN | : 9780819423788 |
Download Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography Book in PDF, ePub and Kindle
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.
Author | : Prosenjit Rai-Choudhury |
Publisher | : |
Total Pages | : 776 |
Release | : 1997 |
Genre | : Electronic book |
ISBN | : |
Download Handbook of Microlithography, Micromachining, and Microfabrication Book in PDF, ePub and Kindle
Author | : P. Rai-Choudhury {u. a. |
Publisher | : |
Total Pages | : |
Release | : |
Genre | : Microfabrication |
ISBN | : |
Download Handbook of Microlithography, Micromachining, and Microfabrication Book in PDF, ePub and Kindle
Author | : P. Rai-Choudhury |
Publisher | : INSPEC, Incorporated |
Total Pages | : 0 |
Release | : 1997 |
Genre | : Microfabrication |
ISBN | : 9780852969106 |
Download Handbook of Microlithography, Micromachining, and Microfabrication Book in PDF, ePub and Kindle
Author | : P. Rai-Choudhury |
Publisher | : |
Total Pages | : 692 |
Release | : 1997 |
Genre | : |
ISBN | : |
Download Handbook of Microlithography, Micromachining, and Microfabrication Book in PDF, ePub and Kindle
Author | : P. Rai-Choudhury |
Publisher | : SPIE Press |
Total Pages | : 706 |
Release | : 1997 |
Genre | : Technology & Engineering |
ISBN | : 9780819423795 |
Download Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication Book in PDF, ePub and Kindle
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Author | : Prosenjit Rai-Choudhury |
Publisher | : |
Total Pages | : 776 |
Release | : 1997-03-30 |
Genre | : |
ISBN | : 9780819497864 |
Download Handbook of Microlithography, Micromachining, and Microfabrication Book in PDF, ePub and Kindle
The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
Author | : P. Rai-Choudhury |
Publisher | : IET |
Total Pages | : 784 |
Release | : 1997 |
Genre | : Technology & Engineering |
ISBN | : 9780852969069 |
Download Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography Book in PDF, ePub and Kindle
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Author | : Sami Franssila |
Publisher | : John Wiley & Sons |
Total Pages | : 534 |
Release | : 2010-10-29 |
Genre | : Technology & Engineering |
ISBN | : 1119991897 |
Download Introduction to Microfabrication Book in PDF, ePub and Kindle
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e