Fundamental Aspects of Focused Ion Beam Micromachining
Author | : John G. Pellerin |
Publisher | : |
Total Pages | : 260 |
Release | : 1990 |
Genre | : |
ISBN | : |
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Author | : John G. Pellerin |
Publisher | : |
Total Pages | : 260 |
Release | : 1990 |
Genre | : |
ISBN | : |
Author | : Maja D. Bachmann |
Publisher | : Springer Nature |
Total Pages | : 167 |
Release | : 2020-08-28 |
Genre | : Technology & Engineering |
ISBN | : 3030513629 |
This thesis presents pioneering work in the relatively new field of focused ion beam (FIB) sculpting of single crystals to produce bespoke devices and enable the investigation of physics that cannot be studied in bulk samples. It begins with a comprehensive and didactic account of how to achieve this sculpting, revealing the ‘tricks of the trade’ of state-of-the-art FIB microstructuring. In subsequent chapters, the author presents ground-breaking results obtained from microstructures of the delafossite oxide metal PdCoO2 and the heavy fermion superconductor CeIrIn5. In these elegant, forefront experiments, a new form of directional ballistic transport in the ultra-pure delafossites is described and explained. Furthermore, a new way to spatially modulate superconductivity induced by strain is demonstrated with electrical transport measurements that agree well with predictions based on thermoelastic finite element simulations.
Author | : Nan Yao |
Publisher | : Cambridge University Press |
Total Pages | : 0 |
Release | : 2011-04-14 |
Genre | : Technology & Engineering |
ISBN | : 9780521158596 |
The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.
Author | : Nelson W. White |
Publisher | : |
Total Pages | : 138 |
Release | : 2005 |
Genre | : Focused ion beams |
ISBN | : |
Author | : Lucille A. Giannuzzi |
Publisher | : Springer Science & Business Media |
Total Pages | : 362 |
Release | : 2006-05-18 |
Genre | : Science |
ISBN | : 038723313X |
Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Author | : Marc J. Madou |
Publisher | : CRC Press |
Total Pages | : 764 |
Release | : 2018-10-08 |
Genre | : Technology & Engineering |
ISBN | : 1482274000 |
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Author | : David C. Cox |
Publisher | : Morgan & Claypool Publishers |
Total Pages | : 119 |
Release | : 2015-10-01 |
Genre | : Technology & Engineering |
ISBN | : 1681741482 |
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology. Beginning with a description of the currently available instruments including the new addition to the field of plasma-based sources, it then gives an overview of ion solid interactions and how the different types of instrument can be applied. Chapters then describe how these machines can be applied to the field of materials science and device fabrication giving examples of recent and current activity in both these areas.
Author | : Marc J. Madou |
Publisher | : CRC Press |
Total Pages | : 3654 |
Release | : 2018-12-14 |
Genre | : Technology & Engineering |
ISBN | : 1351990616 |
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Author | : Donna Marie Thaus |
Publisher | : |
Total Pages | : 272 |
Release | : 1996 |
Genre | : |
ISBN | : |
Author | : Golam Kibria |
Publisher | : Springer |
Total Pages | : 431 |
Release | : 2017-03-07 |
Genre | : Technology & Engineering |
ISBN | : 3319520091 |
This book presents a complete coverage of micromachining processes from their basic material removal phenomena to past and recent research carried by a number of researchers worldwide. Chapters on effective utilization of material resources, improved efficiency, reliability, durability, and cost effectiveness of the products are presented. This book provides the reader with new and recent developments in the field of micromachining and microfabrication of engineering materials.