Fabrication Measurement And Analysis Of Nanomechanical Structures In Silicon PDF Download
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Author | : Dustin Wade Carr |
Publisher | : |
Total Pages | : 298 |
Release | : 2000 |
Genre | : |
ISBN | : |
Download Fabrication, Measurement, and Analysis of Nanomechanical Structures in Silicon Book in PDF, ePub and Kindle
Author | : Bin Li |
Publisher | : |
Total Pages | : 348 |
Release | : 2007 |
Genre | : Electron transport |
ISBN | : |
Download Fabrication of Silicon-based Nano-structures and Their Scaling Effects on Mechanical and Electrical Properties Book in PDF, ePub and Kindle
Silicon-based nanostructures are essential building blocks for nanoelectronic devices and nano-electromechanical systems (NEMS), and their mechanical and electrical properties play an important role in controlling the functionality and reliability of the nano-devices. The objective of this dissertation is twofold: The first is to investigate the mechanical properties of silicon nanolines (SiNLs) with feature size scaled into the tens of nanometer level. And the second is to study the electron transport in nickel silicide formed on the SiNLs. For the first study, a fabrication process was developed to form nanoscale Si lines using an anisotropic wet etching technique. The SiNLs possessed straight and nearly atomically flat sidewalls, almost perfectly rectangular cross sections and highly uniform linewidth at the nanometer scale. To characterize mechanical properties, an atomic force microscope (AFM) based nanoindentation system was employed to investigate three sets of silicon nanolines. The SiNLs had the linewidth ranging from 24 nm to 90 nm, and the aspect ratio (Height/linewidth) from 7 to 18. During indentation, a buckling instability was observed at a critical load, followed by a displacement burst without a load increase, then a fully recoverable deformation upon unloading. For experiments with larger indentation displacements, irrecoverable indentation displacements were observed due to fracture of Si nanolines, with the strain to failure estimated to be from 3.8% to 9.7%. These observations indicated that the buckling behavior of SiNLs depended on the combined effects of load, line geometry, and the friction at contact. This study demonstrated a valuable approach to fabrication of well-defined Si nanoline structures and the application of the nanoindentation method for investigation of their mechanical properties at the nanoscale. For the study of electron transport, a set of nickel monosilicde (NiSi) nanolines with feature size down to 15 nm was fabricated. The linewidth effect on nickel silicide formation has been studied using high-resolution transmission electron microscopy (HRTEM) for microstructural analysis. Four point probe electrical measurements showed that the residual resistivity of the NiSi lines at cryogenic temperature increased with decreasing line width, indicating effect of increased electron sidewall scattering with decreased line width. A mean free path for electron transport at room temperature of 5 nm was deduced, which suggests that nickel silicide can be used without degradation of device performance in nanoscale electronics.
Author | : |
Publisher | : |
Total Pages | : 886 |
Release | : 2008 |
Genre | : Dissertations, Academic |
ISBN | : |
Download Dissertation Abstracts International Book in PDF, ePub and Kindle
Author | : Bahareh Yaghootkar |
Publisher | : |
Total Pages | : 115 |
Release | : 2014 |
Genre | : |
ISBN | : |
Download A Study of Novel Fabrication Techniques for Development of 3-D Silicon Nano-structure Array Book in PDF, ePub and Kindle
The large surface area and high aspect ratio of nano-structures make them promising candidates as a fundamental building block for manufacturing various devices. The potential applications of silicon nano-structure array include, but are not limited to, electron emitters, sensors, solar cells, rechargeable batteries, and hydrogen storage devices. With advances in nanotechnology, various techniques have been reported for synthesis and fabrication of nano-structures. However, these techniques like chemical vapor deposition and vapor liquid solid suffer from the need of very sophisticated and high cost equipment. Furthermore, the need of high operating temperature, high vacuum, and catalyst material such as gold are major challenges of these techniques. On the other hand some fabrication techniques such as top-down approaches involve complicated fabrication steps that ultimately increase the cost of the device. Therefore, a rising impetus has been devoted to development of less complicated and low-cost fabrication techniques of silicon nano-structure. The goal of this thesis was to introduce novel and cost-effective fabrication methods which also maintain the benefits of CMOS compatibility. Two non-lithography top-down approaches were introduced for fabrication of silicon nano-structures array with capability of controlling the structure characteristics. The first fabrication approach consists of three steps: 1) patterning of silicon surface in TMAH using anisotropic etching technique, 2) formation of porous layer on patterned silicon surface using electrochemical anodic etching, and 3) treatment of porous silicon layer using an alkaline etching to reveal the silicon nano-structure array. The second fabrication approach consisted of two steps, namely: Anisotropic etching followed by electrochemical etching. The main idea behind this approach was that unlike the first approach the electrochemical etching is performed in transition regime not porous silicon formation regime. These techniques allowed for the controlling the characteristics and morphology of silicon nano-structures. Completely different morphologies of nanostructures were achieved as a result of transforming the electrochemical process from porous silicon formation to transition regime. A study on effect of type of dopant, p- and n-type, on over-mentioned fabrication methods was also investigated.
Author | : |
Publisher | : |
Total Pages | : 848 |
Release | : 1999 |
Genre | : Dissertation abstracts |
ISBN | : |
Download American Doctoral Dissertations Book in PDF, ePub and Kindle
Author | : Ampere A. Tseng |
Publisher | : World Scientific |
Total Pages | : 583 |
Release | : 2008 |
Genre | : Science |
ISBN | : 9812700765 |
Download Nanofabrication Book in PDF, ePub and Kindle
Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students.Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices.
Author | : Bharat Bhushan |
Publisher | : Springer Science & Business Media |
Total Pages | : 633 |
Release | : 2011-05-30 |
Genre | : Technology & Engineering |
ISBN | : 364215283X |
Download Nanotribology and Nanomechanics I Book in PDF, ePub and Kindle
The comprehensive reference and textbook serves as a timely, practical introduction to the principles of nanotribology and nanomechanics. Assuming some familiarity with macroscopic tribology, the book comprises chapters by internationally recognized experts, who integrate knowledge of the field from the mechanics and materials-science perspectives. They cover key measurement techniques, their applications, and theoretical modelling of interfaces, each beginning their contributions with macro- and progressing to microconcepts.
Author | : Seung Hong |
Publisher | : CRC Press |
Total Pages | : 410 |
Release | : 2016-04-14 |
Genre | : Science |
ISBN | : 1315644681 |
Download Advanced Materials, Mechanical and Structural Engineering Book in PDF, ePub and Kindle
In the last decades, advanced materials and mechanics has become a hot topic in engineering. Recent trends show that the application of nanotechnology and environmental science together with advanced materials and mechanics are playing an increasingly important role in engineering applications. For catching up with this current trend, this boo
Author | : Bharat Bhushan |
Publisher | : Springer |
Total Pages | : 930 |
Release | : 2017-04-05 |
Genre | : Technology & Engineering |
ISBN | : 3319514334 |
Download Nanotribology and Nanomechanics Book in PDF, ePub and Kindle
This textbook and comprehensive reference source and serves as a timely, practical introduction to the principles of nanotribology and nanomechanics. This 4th edition has been completely revised and updated, concentrating on the key measurement techniques, their applications, and theoretical modeling of interfaces. It provides condensed knowledge of the field from the mechanics and materials science perspectives to graduate students, research workers, and practicing engineers.
Author | : Leland Chang |
Publisher | : |
Total Pages | : 444 |
Release | : 2003 |
Genre | : |
ISBN | : |
Download Nanoscale Thin-body CMOS Devices Book in PDF, ePub and Kindle