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| Author | : Thomas B. Jones |
| Publisher | : Cambridge University Press |
| Total Pages | : 581 |
| Release | : 2013-05-02 |
| Genre | : Technology & Engineering |
| ISBN | : 0521764831 |
A comprehensive MEMS textbook, with worked examples and numerous homework problems.
| Author | : Jones, Thomas Byron Jones |
| Publisher | : |
| Total Pages | : 559 |
| Release | : 2013 |
| Genre | : Electronic books |
| ISBN | : |
Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles"
| Author | : Nadim Maluf |
| Publisher | : Artech House |
| Total Pages | : 312 |
| Release | : 2004 |
| Genre | : Technology & Engineering |
| ISBN | : 9781580535915 |
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
| Author | : Abraham Phillip Lee |
| Publisher | : |
| Total Pages | : 892 |
| Release | : 2001-01-01 |
| Genre | : Electromechanical devices |
| ISBN | : 9780791835555 |
| Author | : Cornelius T. Leondes |
| Publisher | : Springer |
| Total Pages | : 0 |
| Release | : 2006-05-17 |
| Genre | : Technology & Engineering |
| ISBN | : 9780387245201 |
As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topics spanning this diverse field require the 5-volume extent of this notable reference resource that is based on the work of an internationally recognized board of coauthors.
| Author | : Arno Lenk |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 483 |
| Release | : 2010-10-01 |
| Genre | : Technology & Engineering |
| ISBN | : 3642108067 |
Electromechanical systems consisting of electrical, mechanical and acoustic subsystems are of special importance in various technical fields, e.g. precision device engineering, sensor and actuator technology, electroacoustics and medical engineering. Based on a circuit-oriented representation, providing readers with a descriptive engineering design method for these systems is the goal of this textbook. It offers an easy and fast introduction to mechanical, acoustic, fluid, thermal and hydraulic problems through the application of circuit-oriented basic knowledge. The network description methodology, presented in detail, is extended to finite network elements and combined with the finite element method (FEM): the combination of the advantages of both description methods results in novel approaches, especially in the higher frequency range. The book offers numerous current examples of both the design of sensors and actuators and that of direct coupled sensor-actuator systems. The appendix provides more extensive fundamentals for signal description, as well as a compilation of important material characteristics. The textbook is suitable both for graduate students and for engineers working in the fields of electrical engineering, information technology, mechatronics, microtechnology, and mechanical and medical engineering.
| Author | : Alberto Corigliano |
| Publisher | : John Wiley & Sons |
| Total Pages | : 332 |
| Release | : 2018-04-02 |
| Genre | : Technology & Engineering |
| ISBN | : 1119053838 |
Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.
| Author | : National Research Council |
| Publisher | : National Academies Press |
| Total Pages | : 76 |
| Release | : 1998-01-01 |
| Genre | : Technology & Engineering |
| ISBN | : 0309059801 |
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
| Author | : M. Edward Motamedi |
| Publisher | : SPIE Press |
| Total Pages | : 640 |
| Release | : 2005 |
| Genre | : Technology & Engineering |
| ISBN | : 9780819450210 |
This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.
| Author | : James J. Allen |
| Publisher | : CRC Press |
| Total Pages | : 492 |
| Release | : 2005-07-08 |
| Genre | : Technology & Engineering |
| ISBN | : 1420027751 |
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,
