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Electrical Atomic Force Microscopy for Nanoelectronics

Electrical Atomic Force Microscopy for Nanoelectronics
Author: Umberto Celano
Publisher: Springer
Total Pages: 408
Release: 2019-08-01
Genre: Science
ISBN: 3030156125

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The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.


Scanning Probe Microscopy

Scanning Probe Microscopy
Author: Sergei V. Kalinin
Publisher: Springer Science & Business Media
Total Pages: 1002
Release: 2007-04-03
Genre: Technology & Engineering
ISBN: 0387286683

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This volume will be devoted to the technical aspects of electrical and electromechanical SPM probes and SPM imaging on the limits of resolution, thus providing technical introduction into the field. This volume will also address the fundamental physical phenomena underpinning the imaging mechanism of SPMs.


Conductive Atomic Force Microscopy

Conductive Atomic Force Microscopy
Author: Mario Lanza
Publisher: John Wiley & Sons
Total Pages: 382
Release: 2017-12-04
Genre: Science
ISBN: 3527340912

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The first book to summarize the applications of CAFM as the most important method in the study of electronic properties of materials and devices at the nanoscale. To provide a global perspective, the chapters are written by leading researchers and application scientists from all over the world and cover novel strategies, configurations and setups where new information will be obtained with the help of CAFM. With its substantial content and logical structure, this is a valuable reference for researchers working with CAFM or planning to use it in their own fields of research.


Noncontact Atomic Force Microscopy

Noncontact Atomic Force Microscopy
Author: Seizo Morita
Publisher: Springer Science & Business Media
Total Pages: 410
Release: 2009-09-18
Genre: Technology & Engineering
ISBN: 364201495X

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Since the original publication of Noncontact Atomic Force Microscopy in 2002, the noncontact atomic force microscope (NC-AFM) has achieved remarkable progress. This second treatment deals with the following outstanding recent results obtained with atomic resolution since then: force spectroscopy and mapping with atomic resolution; tuning fork; atomic manipulation; magnetic exchange force microscopy; atomic and molecular imaging in liquids; and other new technologies. These results and technologies are now helping evolve NC-AFM toward practical tools for characterization and manipulation of individual atoms/molecules and nanostructures with atomic/subatomic resolution. Therefore, the book exemplifies how NC-AFM has become a crucial tool for the expanding fields of nanoscience and nanotechnology.


Nanoscale Characterisation of Ferroelectric Materials

Nanoscale Characterisation of Ferroelectric Materials
Author: Marin Alexe
Publisher: Springer Science & Business Media
Total Pages: 290
Release: 2013-03-09
Genre: Science
ISBN: 3662089017

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This book presents recent advances in the field of nanoscale characterization of ferroelectric materials using scanning probe microscopy (SPM). It addresses various imaging mechanisms of ferroelectric domains in SPM, quantitative analysis of the piezoresponse signals as well as basic physics of ferroelectrics at the nanoscale level, such as nanoscale switching, scaling effects, and transport behavior. This state-of-the-art review of theory and experiments on nanoscale polarization phenomena will be a useful reference for advanced readers as well for newcomers and graduate students interested in the SPM techniques. The non-specialists will obtain valuable information about different approaches to electrical characterization by SPM, while researchers in the ferroelectric field will be provided with details of SPM-based measurements of ferroelectrics.


Noncontact Atomic Force Microscopy

Noncontact Atomic Force Microscopy
Author: S. Morita
Publisher: Springer Science & Business Media
Total Pages: 448
Release: 2012-12-06
Genre: Technology & Engineering
ISBN: 3642560199

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Since 1995, the noncontact atomic force microscope (NC-AFM) has achieved remarkable progress. Based on nanomechanical methods, the NC-AFM detects the weak attractive force between the tip of a cantilever and a sample surface. This method has the following characteristics: it has true atomic resolution; it can measure atomic force interactions, i.e. it can be used in so-called atomic force spectroscopy (AFS); it can also be used to study insulators; and it can measure mechanical responses such as elastic deformation. This is the first book that deals with all of the emerging NC-AFM issues.


Scanning Probe Microscopy

Scanning Probe Microscopy
Author: Nikodem Tomczak
Publisher: World Scientific
Total Pages: 277
Release: 2011
Genre: Science
ISBN: 9814324760

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Scanning Probe Microscopy (SPM) is the enabling tool for nano(bio)technology, which has opened new vistas in many interdisciplinary research areas. Concomitant with the developments in SPM instrumentation and techniques are new and previously unthought-of opportunities in materials nanofabrication and characterisation. In particular, the developments in addressing and manipulating matter at the level of single atoms or molecules, and studies of biological materials (e.g. live cells, or cell membranes) result in new and exciting discoveries. The rising importance of SPM demands a concise treatment in the form of a book which is accessible to interdisciplinary practitioners. This book highlights recent advances in the field of SPM with sufficient depth and breadth to provide an intellectually stimulating overview of the current state of the art. The book is based on a set of carefully selected original works from renowned contributors on topics that range from atom technology, scanning tunneling spectroscopy of self-assembled nanostructures, SPM probe fabrication, scanning force microscopy applications in biology and materials science down to the single molecule level, novel scanning probe techniques, and nanolithography. The variety of topics underlines the strong interdisciplinary character of SPM related research and the combined expertise of the contributors gives us a unique opportunity to discuss possible future trends in SPM related research. This makes the book not merely a collection of already published material but an enlightening insight into cutting edge research and global SPM research trends.


Atomic Force Microscopy

Atomic Force Microscopy
Author: Peter Eaton
Publisher: OUP Oxford
Total Pages: 256
Release: 2010-03-25
Genre: Science
ISBN: 0191576670

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Atomic force microscopy (AFM) is an amazing technique that allies a versatile methodology (that allows measurement of samples in liquid, vacuum or air) to imaging with unprecedented resolution. But it goes one step further than conventional microscopic techniques; it allows us to make measurements of magnetic, electrical or mechanical properties of the widest possible range of samples, with nanometre resolution. This book will demystify AFM for the reader, making it easy to understand, and to use. It is written by authors who together have more than 30 years experience in the design, construction, and use of AFMs and will explain why the microscopes are made the way they are, how they should be used, what data they can produce, and what can be done with the data. Illustrative examples from the physical sciences, materials science, life sciences, nanotechnology and industry demonstrate the different capabilities of the technique.


Metrology and Diagnostic Techniques for Nanoelectronics

Metrology and Diagnostic Techniques for Nanoelectronics
Author: Zhiyong Ma
Publisher: CRC Press
Total Pages: 1454
Release: 2017-03-27
Genre: Science
ISBN: 1351733958

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Nanoelectronics is changing the way the world communicates, and is transforming our daily lives. Continuing Moore’s law and miniaturization of low-power semiconductor chips with ever-increasing functionality have been relentlessly driving R&D of new devices, materials, and process capabilities to meet performance, power, and cost requirements. This book covers up-to-date advances in research and industry practices in nanometrology, critical for continuing technology scaling and product innovation. It holistically approaches the subject matter and addresses emerging and important topics in semiconductor R&D and manufacturing. It is a complete guide for metrology and diagnostic techniques essential for process technology, electronics packaging, and product development and debugging—a unique approach compared to other books. The authors are from academia, government labs, and industry and have vast experience and expertise in the topics presented. The book is intended for all those involved in IC manufacturing and nanoelectronics and for those studying nanoelectronics process and assembly technologies or working in device testing, characterization, and diagnostic techniques.


Atomic Force Microscopy for Energy Research

Atomic Force Microscopy for Energy Research
Author: Cai Shen
Publisher: CRC Press
Total Pages: 457
Release: 2022-04-26
Genre: Science
ISBN: 1000577872

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Details the use of advanced AFMs and addresses all types of functional AFMs First book to focus on application of AFM for energy research Enables readers to operate an AFM successfully and to understand the data obtained Covers new achievements in AFM instruments, including higher speed and resolution, automatic and deep learning AFM, and how AFM is being combined with other new methods like IR and Raman microscopy