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Dielectrics for Nanosystems

Dielectrics for Nanosystems
Author:
Publisher: The Electrochemical Society
Total Pages: 508
Release: 2004
Genre: Dielectrics
ISBN: 9781566774178

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Physics and Technology of High-k Gate Dielectrics 5

Physics and Technology of High-k Gate Dielectrics 5
Author: Samares Kar
Publisher: The Electrochemical Society
Total Pages: 676
Release: 2007
Genre: Dielectrics
ISBN: 1566775701

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This issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.