Dielectric Thin Films for Future ULSI Devices
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Author | : Kikuo Yamabe |
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Total Pages | : 129 |
Release | : 2004 |
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Author | : Akira Sakai |
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Genre | : Dielectric films |
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Author | : Akira Sakai |
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Total Pages | : 129 |
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Author | : Takashi Nakayama |
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Publisher | : The Electrochemical Society |
Total Pages | : 508 |
Release | : 2004 |
Genre | : Dielectrics |
ISBN | : 9781566774178 |
Author | : Samares Kar |
Publisher | : The Electrochemical Society |
Total Pages | : 676 |
Release | : 2007 |
Genre | : Dielectrics |
ISBN | : 1566775701 |
This issue covers in detail all aspects of the physics and the technology of high dielectric constant gate stacks, including high mobility substrates, high dielectric constant materials, processing, metals for gate electrodes, interfaces, physical, chemical, and electrical characterization, gate stack reliability, and DRAM and non-volatile memories.