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Development of Nano-Structured Thin Film Shape Memory Alloys for MEMS Applications

Development of Nano-Structured Thin Film Shape Memory Alloys for MEMS Applications
Author:
Publisher:
Total Pages:
Release: 2004
Genre:
ISBN:

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The production of thin film TiPdNi shape memory alloys (SMA) using ion beam assisted deposition (IBAD) is being studied as a way to increase the actuation frequencies and transformation temperatures of thin film SMA for micro-actuator applications. The capability to transmit extremely high forces along with a large stroke, large strain memory, and high corrosion resistance makes shape memory alloys prime candidates for use in micro-actuator applications. However, low actuation frequency (~1Hz at macro-scale), and low transition temperature (below 100°C) makes commercially available NiTi incompatible with applications in extreme environments. The transformation temperature and actuation frequency of shape memory alloys can be improved through the production of thin film TiPdNi. Through the substitution of Pd for Ni in equiatomic NiTi, the transformation temperature can be varied from approximately room temperature to 527°C. The composition that has received the most attention is Ti50Pd30Ni20 because of its transformation temperature of over 200°C. However, the shape memory effect of Ti50Pd30Ni20 is adversely affected by the low critical stress needed for slip at high temperatures, which results in unrecoverable strain. Age hardening or thermo-mechanical treatments such as cold rolling have been found to improve the critical stress for slip in bulk form SMA due to an increased density of dislocations. Precipitation hardening, as well as, ion bombardment, is expected to increase the high temperature properties in IBAD deposited Ti50Pd30Ni20 film SMA. Additionally, ion bombardment during deposition can be used to improve film properties such as morphology, density, stress level, crystallinity, as well as, limit defects. Due to the refined grain size, increased density, and reduced defects, IBAD is able to produce films of 1 micron or less, which will greatly reduces the SMA actuation time due to the increased surface area --to -- volume ratio. In t.


Thin Film Shape Memory Alloys

Thin Film Shape Memory Alloys
Author: Shuichi Miyazaki
Publisher: Cambridge University Press
Total Pages: 487
Release: 2009-09-03
Genre: Technology & Engineering
ISBN: 1139481045

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This book, the first dedicated to this exciting and rapidly growing field, enables readers to understand and prepare high-quality, high-performance TiNi shape memory alloys (SMAs). It covers the properties, preparation and characterization of TiNi SMAs, with particular focus on the latest technologies and applications in MEMS and biological devices. Basic techniques and theory are covered to introduce new-comers to the subject, whilst various sub-topics, such as film deposition, characterization, post treatment, and applying thin films to practical situations, appeal to more informed readers. Each chapter is written by expert authors, providing an overview of each topic and summarizing all the latest developments, making this an ideal reference for practitioners and researchers alike.


Final Technical Report

Final Technical Report
Author: John Perepezko
Publisher:
Total Pages: 88
Release: 2005
Genre:
ISBN:

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With this grant we explored the properties that result from combining the effects of nanostructuring and shape memory using both experimental and theoretical approaches. We developed new methods to make nanostructured NiTi by melt-spinning and cold rolling fabrication strategies, which elicited significantly different behavior. A template synthesis method was also used to created nanoparticles. In order to characterize the particles we created, we developed a new magnetically-assisted particle manipulation technique to manipulate and position nanoscale samples for testing. Beyond characterization, this technique has broader implications for assembly of nanoscale devices and we demonstrated promising applications for optical switching through magnetically-controlled scattering and polarization capabilities. Nanoparticles of nickel-titanium (NiTi) shape memory alloy were also produced using thin film deposition technology and nanosphere lithography. Our work revealed the first direct evidence that the thermally-induced martensitic transformation of these films allows for partial indent recovery on the nanoscale. In addition to thoroughly characterizing and modeling the nanoindentation behavior in NiTi thin films, we demonstrated the feasibility of using nanoindentation on an SMA film for write-read-erase schemes for data storage.


Nanostructured Thin Films and Coatings

Nanostructured Thin Films and Coatings
Author: Sam Zhang
Publisher: CRC Press
Total Pages: 415
Release: 2010-06-18
Genre: Technology & Engineering
ISBN: 1420093975

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Authored by leading experts from around the world, the three-volume Handbook of Nanostructured Thin Films and Coatings gives scientific researchers and product engineers a resource as dynamic and flexible as the field itself. The first two volumes cover the latest research and application of the mechanical and functional properties of thin films an


Thin Film Shape Memory Alloys

Thin Film Shape Memory Alloys
Author: Shuichi Miyazaki
Publisher: Cambridge University Press
Total Pages: 487
Release: 2009-09-03
Genre: Science
ISBN: 0521885760

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The first dedicated book describing the properties, preparation, characterization and device applications of TiNi-based shape memory alloys.


Handbook of Nanostructured Thin Films and Coatings: Nanostructured thin films and coatings : functional properties

Handbook of Nanostructured Thin Films and Coatings: Nanostructured thin films and coatings : functional properties
Author: Sam Zhang
Publisher:
Total Pages: 432
Release: 2010
Genre: Coating processes
ISBN:

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The contributors to this second volume focus on functional properties, including optical, electronic, and electrical properties, as well as related devices and applications.


Multilayer Thin Films

Multilayer Thin Films
Author: Sukumar Basu
Publisher: BoD – Books on Demand
Total Pages: 274
Release: 2020-01-15
Genre: Technology & Engineering
ISBN: 1789854377

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This book, "Multilayer Thin Films-Versatile Applications for Materials Engineering", includes thirteen chapters related to the preparations, characterizations, and applications in the modern research of materials engineering. The evaluation of nanomaterials in the form of different shapes, sizes, and volumes needed for utilization in different kinds of gadgets and devices. Since the recently developed two-dimensional carbon materials are proving to be immensely important for new configurations in the miniature scale in the modern technology, it is imperative to innovate various atomic and molecular arrangements for the modifications of structural properties. Of late, graphene and graphene-related derivatives have been proven as the most versatile two-dimensional nanomaterials with superb mechanical, electrical, electronic, optical, and magnetic properties. To understand the in-depth technology, an effort has been made to explain the basics of nano dimensional materials. The importance of nano particles in various aspects of nano technology is clearly indicated. There is more than one chapter describing the use of nanomaterials as sensors. In this volume, an effort has been made to clarify the use of such materials from non-conductor to highly conducting species. It is expected that this book will be useful to the postgraduate and research students as this is a multidisciplinary subject.


Design, Fabrication, and Characterization of Multifunctional Nanomaterials

Design, Fabrication, and Characterization of Multifunctional Nanomaterials
Author: Sabu Thomas
Publisher: Elsevier
Total Pages: 610
Release: 2021-11-24
Genre: Science
ISBN: 012820883X

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Design, Fabrication, and Characterization of Multifunctional Nanomaterials covers major techniques for the design, synthesis, and development of multifunctional nanomaterials. The chapters highlight the main characterization techniques, including X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, energy dispersive X-ray spectroscopy, and scanning probe microscopy.The book explores major synthesis methods and functional studies, including: Brillouin spectroscopy; Temperature-dependent Raman spectroscopic studies; Magnetic, ferroelectric, and magneto-electric coupling analysis; Organ-on-a-chip methods for testing nanomaterials; Magnetron sputtering techniques; Pulsed laser deposition techniques; Positron annihilation spectroscopy to prove defects in nanomaterials; Electroanalytic techniques. This is an important reference source for materials science students, scientists, and engineers who are looking to increase their understanding of design and fabrication techniques for a range of multifunctional nanomaterials. Explains the major design and fabrication techniques and processes for a range of multifunctional nanomaterials; Demonstrates the design and development of magnetic, ferroelectric, multiferroic, and carbon nanomaterials for electronic applications, energy generation, and storage; Green synthesis techniques and the development of nanofibers and thin films are also emphasized.


Synthesis and Characterization of NiMnGa Ferromagnetic Shape Memory Alloy Thin Films

Synthesis and Characterization of NiMnGa Ferromagnetic Shape Memory Alloy Thin Films
Author: Nishitha Jetta
Publisher:
Total Pages:
Release: 2011
Genre:
ISBN:

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Ni-Mn-Ga is a ferromagnetic shape memory alloy that can be used for future sensors and actuators. It has been shown that magnetic field can induce phase transformation and consequently large strain in stoichiometric Ni2MnGa. Since then considerable progress has been made in understanding the underlying science of shape memory and ferromagnetic shape memory in bulk materials. Ni-Mn-Ga thin films, however is a relatively under explored area. Ferromagnetic shape memory alloy thin films are conceived as the future MEMS sensor and actuator materials. With a 9.5 percent strain rate reported from magnetic reorientation, Ni-Mn-Ga thin films hold great promise as actuator materials. Thin films come with a number of advantages and challenges as compared to their bulk counterparts. While properties like mechanical strength, uniformity are much better in thin film form, high stress and constraint from the substrate pose a significant challenge for reorientation and shape memory behavior. In either case, it is very important to understand their behavior and examine their properties. This thesis is an effort to contribute to the literature of Ni-Mn-Ga thin films as ferromagnetic shape memory alloys. The focus of this project is to develop a recipe for fabricating NiMnGa thin films with desired composition and microstructure and hence unique properties for future MEMS actuator materials and characterize their properties to aid better understanding of their behavior. In this project NiMnGa thin films have been fabricated using magnetron sputtering on a variety of substrates. Magnetron sputtering technique allows us to tailor the composition of films which is crucial for controlling the phase transformation properties of NiMnGa films. The composition is tailored by varying several deposition parameters. Microstructure of the films has been investigated by X-ray diffraction (XRD) and transmission electron microscopy (TEM) techniques. Mechanical properties of as-deposited films have been probed using nano-indentation technique. The chemistry of sputtered films is determined quantitatively by wavelength dispersive X-ray spectroscopy (WDS). Phase transformation is studied by using a combination of differential scanning calorimetry (DSC), in-situ heating in TEM and in-situ XRD instruments. Magnetic properties of films are examined using superconducting quantum interface device (SQUID).