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Tuneable Film Bulk Acoustic Wave Resonators

Tuneable Film Bulk Acoustic Wave Resonators
Author: Spartak Gevorgian
Publisher: Springer Science & Business Media
Total Pages: 255
Release: 2013-02-14
Genre: Technology & Engineering
ISBN: 1447149440

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To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.


Acoustic Wave and Electromechanical Resonators

Acoustic Wave and Electromechanical Resonators
Author: Humberto Campanella
Publisher: Artech House
Total Pages: 364
Release: 2010
Genre: Technology & Engineering
ISBN: 1607839784

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This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.


RF Bulk Acoustic Wave Filters for Communications

RF Bulk Acoustic Wave Filters for Communications
Author: Ken-ya Hashimoto
Publisher: Artech House
Total Pages: 293
Release: 2009
Genre: Technology & Engineering
ISBN: 1596933224

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This timely book presents a thorough overview of RF BAW filters, covering a vast range of technologies, optimal device design, filter topologies, packaging, fabrication processes, and high quality piezoelectric thin films. Moreover, the book discusses the integration of BAW filters in RF systems.


Multilayer Integrated Film Bulk Acoustic Resonators

Multilayer Integrated Film Bulk Acoustic Resonators
Author: Yafei Zhang
Publisher: Springer Science & Business Media
Total Pages: 159
Release: 2012-08-28
Genre: Technology & Engineering
ISBN: 3642317766

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Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.


Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099).

Simulation and Fabrication of Thin Film Bulk Acoustic Wave Resonator*Project Supported by the National Natural Science Foundation of China (Nos. 61274119, 61306141, 61335008) and the Natural Science Foundation of Jiangsu Province (No. BK20131099).
Author:
Publisher:
Total Pages:
Release: 2016
Genre:
ISBN:

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Abstract: In this paper, we present the simulation and fabrication of a thin film bulk acoustic resonator (FBAR). In order to improve the accuracy of simulation, an improved Mason model was introduced to design the resonator by taking the coupling effect between electrode and substrate into consideration. The resonators were fabricated by the eight inch CMOS process, and the measurements show that the improved Mason model is more accurate than a simple Mason model. The Q s ( Q at series resonance), Q p ( Q at parallel resonance), Q max and k t 2 of the FBAR were measured to be 695, 814, 1049, and 7.01% respectively, showing better performance than previous reports.


Design, Modeling and Fabrication of Shear Mode Bulk Acoustic Wave Sensor as a Potential Biosensor

Design, Modeling and Fabrication of Shear Mode Bulk Acoustic Wave Sensor as a Potential Biosensor
Author: Chi-Jung Cheng
Publisher:
Total Pages: 117
Release: 2012
Genre:
ISBN:

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There has been an increasing interest in development of thin film bulk acoustic wave resonator devices for chemical and biological sensing applications in the environmental and biomedical industries. The zinc oxide thin film FBAR devices provide attractive advantages, such as high resonant frequency, small size, and rapid response. Typically, the ZnO-based FBAR devices are operated in the longitudinal wave mode where the ZnO crystallites are perpendicular to the substrate. However, the longitudinal wave mode is adversely affected when used in liquid environments. To overcome this limitation, the shear mode solidly mounted film bulk acoustic wave resonator device is presented in this dissertation.


Surface Acoustic Wave Devices for Mobile and Wireless Communications, Four-Volume Set

Surface Acoustic Wave Devices for Mobile and Wireless Communications, Four-Volume Set
Author: Colin Campbell
Publisher: Academic Press
Total Pages: 660
Release: 1998-06-17
Genre: Art
ISBN: 9780121573409

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Written for readers with or without surface acoustic wave (SAW) experience, this book covers a wide range of SAW filter- and device-design techniques as well as applications to mobile and wireless circuitry. It provides numerous references and worked examples on SAW devices to highlight various design aspects, and contains illustrations from many leading electronic companies around the world. The first half of the book covers the principles of SAW devices. The secondhalf focuses on applications to the mobile/wireless field, including SAW devices for antenna duplexers, RF and IF filters for cellular cordless phones, front-end filters for wireless transceivers, fixed and tunable oscillators, filters for on-board satellite communications, as well as coding and convolvers for indoor/outdoor spread-spectrum communications. Surface Acoustic Wave Devices for Mobile and Wireless Communications serves as an excellent sourcebook for engineers and designers with some SAW background, or for technical staff with no prior knowledge of SAW devices who need to know how this technology can help their products. It can be used as a textbook for senior and graduate students engaged in the study of signal processing techniques and systems for mobile communications. Key Features * First SAW text applied to mobile and wireless communications * Written by an award-winning researcher with over 20 years of SAW device experience * Presents the theory and design of major SAW devices for mobile/wireless communications as applied to some of the major telecommunication standards * Accessible to both engineering and scientific readers with or without prior SAW device knowledge


Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices

Modeling and Measurement Methods for Acoustic Waves and for Acoustic Microdevices
Author: Marco G. Beghi
Publisher: BoD – Books on Demand
Total Pages: 616
Release: 2013-08-28
Genre: Technology & Engineering
ISBN: 9535111892

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Acoustics is a mature field which enjoys a never ending youth. New developments are induced by either the search for a better understanding, or by technological innovations. Micro-fabrication techniques introduced a whole new class of microdevices, which exploit acoustic waves for various tasks, and in particular for information processing and for sensing purposes. Performance improvements are achievable by better modelling tools, able to deal with more complex configurations, and by more refined techniques of fabrication and of integration in technological systems, like wireless communications. Several chapters of this book deal with modelling and fabrication techniques for microdevices, including unconventional phenomena and configurations. But this is far from exhausting the research lines in acoustics. Theoretical analyses and modelling techniques are presented, for phenomena ranging from the detection of cracks to the acoustics of the oceans. Measurement methods are also discussed, which probe by acoustic waves the properties of widely different systems.