Application Oriented Batch Fabrication And System Level Integration Of Thermal Piezoresistive And Piezoelectric M Nems Resonators PDF Download
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| Author | : Emad Mehdizadeh |
| Publisher | : |
| Total Pages | : 276 |
| Release | : 2015 |
| Genre | : Air quality |
| ISBN | : |
Download Application Oriented Batch Fabrication and System Level Integration of Thermal-piezoresistive and Piezoelectric M/NEMS Resonators Book in PDF, ePub and Kindle
Today micro- and nano-electromechanical (MEMS and NEMS) resonant sensors are integral to numerous industrial, environmental, and biomedical applications. Traditionally capacitive and piezoelectric have been the primary options for transduction of high frequency resonant structures. When direct contact with the surrounding environment is needed, however, capacitive resonators are not suitable candidates due to their low Qs and vulnerability to contaminants. Recent developments in the field of high frequency thermally actuated MEMS resonators with piezoresistive detection have enabled a great deal of opportunities for realization of more robust, reliable and sensitive sensing platforms. Such monolithic structures can be conveniently implemented at micro and nanoscale without any fabrication challenges or the need for material integration. Self-sustained oscillation capability and design flexibility for sensory applications are among other unique properties that thermal-piezoresistive transduction offers. The objective of the present research is to explore the untapped potentials of thermal-piezoresistive transduction for expanding the horizons of the field of N/MEMS resonant sensors. Moreover, a new class of piezoelectric MEMS resonant structures capable of operating in liquid media is developed and its potential as a direct real-time chemical and biological sensor is investigated. Low-cost batch fabrication of nanoelectromechanical devices and controllable feature size reduction of such will be among other topics being addressed in the current study. In particular, the crystalline structure of silicon will be exploited to realize nanowires with smooth surface and any length and cross-sectional dimensions using only conventional microfabrication processes.
| Author | : Joseph C. Doll |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 252 |
| Release | : 2013-10-30 |
| Genre | : Technology & Engineering |
| ISBN | : 1461485177 |
Download Piezoresistor Design and Applications Book in PDF, ePub and Kindle
Piezoresistor Design and Applications provides an overview of these MEMS devices and related physics. The text demonstrates how MEMS allows miniaturization and integration of sensing as well as efficient packaging and signal conditioning. This text for engineers working in MEMS design describes the piezoresistive phenomenon and optimization in several applications. Includes detailed discussion of such topics as; coupled models of mechanics, materials and electronic behavior in a variety of common geometric implementations including strain gages, beam bending, and membrane loading. The text concludes with an up-to-date discussion of the need for integrated MEMS design and opportunities to leverage new materials, processes and MEMS technology. Piezoresistor Design and Applications is an ideal book for design engineers, process engineers and researchers.
| Author | : Harmeet Bhugra |
| Publisher | : Springer |
| Total Pages | : 423 |
| Release | : 2017-01-09 |
| Genre | : Technology & Engineering |
| ISBN | : 3319286889 |
Download Piezoelectric MEMS Resonators Book in PDF, ePub and Kindle
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
| Author | : Hamideh Khanbareh |
| Publisher | : Springer |
| Total Pages | : 160 |
| Release | : 2019-05-25 |
| Genre | : Technology & Engineering |
| ISBN | : 3030192040 |
Download Piezo-Particulate Composites Book in PDF, ePub and Kindle
This book provides an overview of the current state of the art in novel piezo-composites based on ferroelectrics. Covering aspects ranging from theoretical materials simulation and manufacturing and characterization methods, to the application and performance of these materials, it focuses on the optimization of the material parameters. Presenting the latest findings on modern composites and highlighting the applications of piezoelectric materials for sensors, transducers and hydro-acoustics, the book addresses an important gap in the physics of active dielectrics and materials science and describes new trends in the research on ferroelectric composites.
| Author | : Nguyen Van Toan |
| Publisher | : CRC Press |
| Total Pages | : 177 |
| Release | : 2019-07-10 |
| Genre | : Technology & Engineering |
| ISBN | : 0429556527 |
Download Capacitive Silicon Resonators Book in PDF, ePub and Kindle
Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators Provides information on the various fabrication technologies and design considerations that can be employed to improve the performance capacitive silicon resonator which is one of the promising options to replace the quartz crystal resonator. Discusses several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, as well as design considerations for mechanically coupled, selective vibration of high-order mode, movable electrode structures, and piezoresistive heat engines were investigated to achieve small motional resistance, low insertion loss, and high quality factor. Focusses on a capacitive sensing method based on the measurement of the change in capacitance between a sensing electrode and the resonant body. Reviews recent progress in performance enhancement methods for capacitive silicon resonator, which are mainly based on the works of the authors.
| Author | : Nava Setter |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 416 |
| Release | : 2006-03-30 |
| Genre | : Technology & Engineering |
| ISBN | : 0387233199 |
Download Electroceramic-Based MEMS Book in PDF, ePub and Kindle
The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.
| Author | : Ulrich Schmid |
| Publisher | : |
| Total Pages | : |
| Release | : 2016 |
| Genre | : |
| ISBN | : 9783038970064 |
Download Piezoelectric MEMS Book in PDF, ePub and Kindle
| Author | : Ahmad Safari |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 483 |
| Release | : 2008-09-11 |
| Genre | : Technology & Engineering |
| ISBN | : 0387765409 |
Download Piezoelectric and Acoustic Materials for Transducer Applications Book in PDF, ePub and Kindle
The book discusses the underlying physical principles of piezoelectric materials, important properties of ferroelectric/piezoelectric materials used in today’s transducer technology, and the principles used in transducer design. It provides examples of a wide range of applications of such materials along with the appertaining rationales. With contributions from distinguished researchers, this is a comprehensive reference on all the pertinent aspects of piezoelectric materials.
| Author | : Ulrich Schmid (Ed.) |
| Publisher | : |
| Total Pages | : |
| Release | : |
| Genre | : |
| ISBN | : |
Download Piezoelectric MEMS Book in PDF, ePub and Kindle
| Author | : Spartak Gevorgian |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 264 |
| Release | : 2013-02-01 |
| Genre | : Technology & Engineering |
| ISBN | : 9781447158448 |
Download Tuneable Film Bulk Acoustic Wave Resonators Book in PDF, ePub and Kindle
To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high.a Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc.Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis.The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices."
