A Users Guide To Ellipsometry PDF Download
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| Author | : Harland G. Tompkins |
| Publisher | : Academic Press |
| Total Pages | : 284 |
| Release | : 1993 |
| Genre | : Science |
| ISBN | : |
Download A User's Guide to Ellipsometry Book in PDF, ePub and Kindle
Specifically designed for the user who wants expanded use of ellipsometry beyond the relatively limited number of turn-key applications, this text provides comprehensive discussion of the measurement of film thickness and optical constants in films. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films.
| Author | : Harland G. Tompkins |
| Publisher | : Courier Corporation |
| Total Pages | : 496 |
| Release | : 2013-03-21 |
| Genre | : Technology & Engineering |
| ISBN | : 0486151921 |
Download A User's Guide to Ellipsometry Book in PDF, ePub and Kindle
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
| Author | : H.G. Tompkins |
| Publisher | : |
| Total Pages | : 0 |
| Release | : |
| Genre | : |
| ISBN | : |
Download Spectroscopic Ellipsometry And Reflectometry User'S Guide Book in PDF, ePub and Kindle
| Author | : Harland G. Tompkins |
| Publisher | : Wiley-Interscience |
| Total Pages | : 0 |
| Release | : 1999-03-18 |
| Genre | : Science |
| ISBN | : 9780471181729 |
Download Spectroscopic Ellipsometry and Reflectometry Book in PDF, ePub and Kindle
While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
| Author | : Harland G. Tompkins |
| Publisher | : Momentum Press |
| Total Pages | : 138 |
| Release | : 2015-12-16 |
| Genre | : Technology & Engineering |
| ISBN | : 1606507281 |
Download Spectroscopic Ellipsometry Book in PDF, ePub and Kindle
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
| Author | : Norbert G. H. Meyendorf |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 435 |
| Release | : 2013-11-21 |
| Genre | : Science |
| ISBN | : 3662089882 |
Download Nondestructive Materials Characterization Book in PDF, ePub and Kindle
With an emphasis on aircraft materials, this book describes techniques for the material characterization to detect and quantify degradation processes such as corrosion and fatigue. It introduces readers to these techniques based on x-ray, ultrasonic, optical and thermal principles and demonstrates the potential of the techniques for a wide variety of applications concerning aircraft materials, especially aluminum and titanium alloys. The advantages and disadvantages of various techniques are evaluated.
| Author | : Hiroyuki Fujiwara |
| Publisher | : John Wiley & Sons |
| Total Pages | : 388 |
| Release | : 2007-09-27 |
| Genre | : Technology & Engineering |
| ISBN | : 9780470060186 |
Download Spectroscopic Ellipsometry Book in PDF, ePub and Kindle
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
| Author | : Harland Tompkins |
| Publisher | : William Andrew |
| Total Pages | : 887 |
| Release | : 2005-01-06 |
| Genre | : Science |
| ISBN | : 0815517475 |
Download Handbook of Ellipsometry Book in PDF, ePub and Kindle
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
| Author | : R. J. Archer |
| Publisher | : |
| Total Pages | : |
| Release | : 1968 |
| Genre | : Optical rotation |
| ISBN | : |
Download Manual on Ellipsometry Book in PDF, ePub and Kindle
| Author | : Mahmood Aliofkhazraei |
| Publisher | : Elsevier |
| Total Pages | : 500 |
| Release | : 2021-03-06 |
| Genre | : Science |
| ISBN | : 044463245X |
Download Handbook of Modern Coating Technologies Book in PDF, ePub and Kindle
Handbook of Modern Coating Technologies: Advanced Characterization Methods reviews advanced characterization methods of modern coating technologies. The topics in this volume consist of scanning vibrating electrode technique, spectroscopic ellipsometry, advances in X-ray diffraction, neutron reflectivity, micro- and nanoprobes, fluorescence technique, stress measurement methods in thin films, micropotentiometry, and localized corrosion studies.
