The Analysis and Design of Film Bulk Acoustic-Wave Resonators
Author | : 戴國圓 |
Publisher | : |
Total Pages | : 169 |
Release | : 2005 |
Genre | : |
ISBN | : |
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Author | : 戴國圓 |
Publisher | : |
Total Pages | : 169 |
Release | : 2005 |
Genre | : |
ISBN | : |
Author | : Yafei Zhang |
Publisher | : Springer Science & Business Media |
Total Pages | : 159 |
Release | : 2012-08-28 |
Genre | : Technology & Engineering |
ISBN | : 3642317766 |
Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.
Author | : Humberto Campanella |
Publisher | : Artech House |
Total Pages | : 364 |
Release | : 2010 |
Genre | : Technology & Engineering |
ISBN | : 1607839784 |
This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
Author | : Spartak Gevorgian |
Publisher | : Springer Science & Business Media |
Total Pages | : 255 |
Release | : 2013-02-14 |
Genre | : Technology & Engineering |
ISBN | : 1447149440 |
To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.
Author | : Ronald Patrick O'Toole |
Publisher | : |
Total Pages | : 200 |
Release | : 1991 |
Genre | : |
ISBN | : |
Author | : G. M. Ashley |
Publisher | : |
Total Pages | : 380 |
Release | : 2005 |
Genre | : |
ISBN | : |
Author | : |
Publisher | : |
Total Pages | : |
Release | : 2016 |
Genre | : |
ISBN | : |
Abstract: In this paper, we present the simulation and fabrication of a thin film bulk acoustic resonator (FBAR). In order to improve the accuracy of simulation, an improved Mason model was introduced to design the resonator by taking the coupling effect between electrode and substrate into consideration. The resonators were fabricated by the eight inch CMOS process, and the measurements show that the improved Mason model is more accurate than a simple Mason model. The Q s ( Q at series resonance), Q p ( Q at parallel resonance), Q max and k t 2 of the FBAR were measured to be 695, 814, 1049, and 7.01% respectively, showing better performance than previous reports.
Author | : Martin Nirschl |
Publisher | : |
Total Pages | : |
Release | : 2011 |
Genre | : |
ISBN | : |
Author | : Marco G. Beghi |
Publisher | : BoD – Books on Demand |
Total Pages | : 616 |
Release | : 2013-08-28 |
Genre | : Technology & Engineering |
ISBN | : 9535111892 |
Acoustics is a mature field which enjoys a never ending youth. New developments are induced by either the search for a better understanding, or by technological innovations. Micro-fabrication techniques introduced a whole new class of microdevices, which exploit acoustic waves for various tasks, and in particular for information processing and for sensing purposes. Performance improvements are achievable by better modelling tools, able to deal with more complex configurations, and by more refined techniques of fabrication and of integration in technological systems, like wireless communications. Several chapters of this book deal with modelling and fabrication techniques for microdevices, including unconventional phenomena and configurations. But this is far from exhausting the research lines in acoustics. Theoretical analyses and modelling techniques are presented, for phenomena ranging from the detection of cracks to the acoustics of the oceans. Measurement methods are also discussed, which probe by acoustic waves the properties of widely different systems.
Author | : Humberto Campanella Pineda |
Publisher | : |
Total Pages | : 234 |
Release | : 2008 |
Genre | : |
ISBN | : 9788469165409 |