Handbook Of Microlithography Micromachining And Microfabrication Microlithography PDF Download

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Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Author: P. Rai-Choudhury
Publisher: SPIE Press
Total Pages: 780
Release: 1997
Genre: Technology & Engineering
ISBN: 9780819423788

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The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.


Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Author: P. Rai-Choudhury
Publisher: IET
Total Pages: 784
Release: 1997
Genre: Technology & Engineering
ISBN: 9780852969069

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Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.


Handbook of Microlithography, Micromachining, and Microfabrication

Handbook of Microlithography, Micromachining, and Microfabrication
Author: Prosenjit Rai-Choudhury
Publisher:
Total Pages: 776
Release: 1997-03-30
Genre:
ISBN: 9780819497864

Download Handbook of Microlithography, Micromachining, and Microfabrication Book in PDF, ePub and Kindle

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.


Lithography Process Control

Lithography Process Control
Author: Harry J. Levinson
Publisher: SPIE Press
Total Pages: 210
Release: 1999
Genre: Photography
ISBN: 9780819430526

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This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines.