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| Author | : Thomas B. Jones |
| Publisher | : Cambridge University Press |
| Total Pages | : 581 |
| Release | : 2013-05-02 |
| Genre | : Technology & Engineering |
| ISBN | : 0521764831 |
A comprehensive MEMS textbook, with worked examples and numerous homework problems.
| Author | : Jones, Thomas Byron Jones |
| Publisher | : |
| Total Pages | : 559 |
| Release | : 2013 |
| Genre | : Electronic books |
| ISBN | : |
Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles"
| Author | : Arno Lenk |
| Publisher | : Springer Science & Business Media |
| Total Pages | : 483 |
| Release | : 2010-10-01 |
| Genre | : Technology & Engineering |
| ISBN | : 3642108067 |
Electromechanical systems consisting of electrical, mechanical and acoustic subsystems are of special importance in various technical fields, e.g. precision device engineering, sensor and actuator technology, electroacoustics and medical engineering. Based on a circuit-oriented representation, providing readers with a descriptive engineering design method for these systems is the goal of this textbook. It offers an easy and fast introduction to mechanical, acoustic, fluid, thermal and hydraulic problems through the application of circuit-oriented basic knowledge. The network description methodology, presented in detail, is extended to finite network elements and combined with the finite element method (FEM): the combination of the advantages of both description methods results in novel approaches, especially in the higher frequency range. The book offers numerous current examples of both the design of sensors and actuators and that of direct coupled sensor-actuator systems. The appendix provides more extensive fundamentals for signal description, as well as a compilation of important material characteristics. The textbook is suitable both for graduate students and for engineers working in the fields of electrical engineering, information technology, mechatronics, microtechnology, and mechanical and medical engineering.
| Author | : Cornelius T. Leondes |
| Publisher | : Springer |
| Total Pages | : 0 |
| Release | : 2006-05-17 |
| Genre | : Technology & Engineering |
| ISBN | : 9780387245201 |
As miniaturization, batch fabrication, and integrated electronics rapidly enable the development of a broad range of smart products, MEMs, MOEMS, and NEMS are creating enormous opportunities for commerce and functionality. This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. The MEMS/NEMS HANDBOOK (Microelectromechanical Systems/Nanoelectromechanical Systems) covers all of the major topics within the subject including design methods, fabrication techniques, manufacturing methods, sensors and actuators, and Micro Optical Electro Mechanical Systems. The many applications of MEMS technology include computer devices, electronics, instrumentation, industrial process control, biotechnology, medicine, chemical systems, office equipment, and communications. More than 100 coauthors from nearly 20 countries present clearly written, self-contained, accessible and comprehensive contributions with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists. The remarkable breadth and depth of the topics spanning this diverse field require the 5-volume extent of this notable reference resource that is based on the work of an internationally recognized board of coauthors.
| Author | : Nadim Maluf |
| Publisher | : Artech House |
| Total Pages | : 312 |
| Release | : 2004 |
| Genre | : Technology & Engineering |
| ISBN | : 9781580535915 |
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
| Author | : Eun Sok Kim |
| Publisher | : McGraw Hill Professional |
| Total Pages | : 415 |
| Release | : 2021-05-14 |
| Genre | : Technology & Engineering |
| ISBN | : 1264257597 |
A complete guide to MEMS engineering, fabrication, and applications This comprehensive engineering guide shows, step by step, how to incorporate cutting-edge microelectromechanical (MEMS) technology to enable internet-of-things (IoT) and artificial intelligence (AI) functionality in your designs. Written by an experienced educator and microelectronics expert, Fundamentals of Microelectromechanical Systems (MEMS) clearly explains the latest technologies and methods. Real-world examples, illustrations, and in-depth questions and problems reinforce key topics throughout. Readers will also take a look at the future of MEMS in the workforce and explore MEMS research and development. Coverage includes: Basic microfabrication Micromachining Transduction principles RF and optical MEMS Mechanics and inertial sensors Thin film properties and SAW/BAW sensors Pressure sensors and microphones Piezoelectric films Material properties expressed as tensor Microfluidic systems and BioMEMS Power MEMS Electronic noises, interface circuits, and oscillators
| Author | : James J. Allen |
| Publisher | : CRC Press |
| Total Pages | : 492 |
| Release | : 2005-07-08 |
| Genre | : Technology & Engineering |
| ISBN | : 1420027751 |
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,
| Author | : Abraham Phillip Lee |
| Publisher | : |
| Total Pages | : 892 |
| Release | : 2001-01-01 |
| Genre | : Electromechanical devices |
| ISBN | : 9780791835555 |
| Author | : National Research Council |
| Publisher | : National Academies Press |
| Total Pages | : 76 |
| Release | : 1998-01-01 |
| Genre | : Technology & Engineering |
| ISBN | : 0309059801 |
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
| Author | : Andrey E. Gorodetskiy |
| Publisher | : Springer |
| Total Pages | : 269 |
| Release | : 2015-12-29 |
| Genre | : Technology & Engineering |
| ISBN | : 331927547X |
This carefully edited book introduces the latest achievements of the scientists of the Russian Academy of Sciences in the field of theory and practice of Smart Electromechanical Systems (SEMS). The book also focuses on methods of designing and modeling of SEMS based on the principles of adaptability, intelligence, biomorphism of parallel kinematics and parallelism in information processing and control computation. The book chapters are dedicated to the following points of interest: - methods of design of SEMS modules and intelligent robots based on them; - synthesis of neural systems of automatic control over SEMS modules; - mathematical and computer modeling of SEMS modules and Cyber Physical Systems based on them; - vitality control and reliability analysis based on logic-and-probabilistic and logic-and-linguistic forecasting; - methods of optimization of SEMS control systems based on mathematical programming methods in ordinal scale and generalized mathematical programming; - information-measuring software of SEMS modules and CPS based on them. This book is intended for students, scientists and engineers specializing in the field of SEMS and robotics, and includes many scientific domains such as kinematics, dynamics, control theory.
